Alumina ceramic ring having high thermal shock resistance and used for polycrystalline silicon reduction furnace as well as preparation method of alumina ceramic ring

An alumina ceramic ring and reduction furnace technology, applied in the field of inorganic non-metallic materials, can solve the problems of high use cost, high unit cost, poor thermal shock resistance, etc., achieve increased mechanical strength and toughness, meet environmental use requirements, The effect of enhancing thermal shock resistance

Inactive Publication Date: 2015-07-22
景德镇晶达新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The surface of quartz material is easy to accumulate silicon, which has poor thermal shock resistance and poor heat insulation effect on radiant heat, which may easily cause the PTFE sleeve outside the electrode to be burned. Ordinary 95 alumina ceramics have poor thermal shock resistance and can only be used once or twice. The use cost is high, the unit cost of silicon nitride ceramics is high, and the surface is easy to accumulate silicon, which will cause short circuit and spark damage to the electrode, seriously affecting production efficiency

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Weigh 77% of α-alumina micropowder, 10% of aluminum titanate micropowder, 5% of magnesia and 8% of zirconia powder according to mass percentage, wherein α-alumina micropowder, aluminum titanate, magnesia The particle size is 4~5 microns, and the particle size of zirconia is 1~2 microns.

[0021] Put the weighed powder into the high-speed stirring mill, add HX-40Y ceramic dispersant, grind in the high-speed stirring mill for 1 hour, then add PVA binder, silicone defoamer, and grind for 2 hours, add The dispersion medium is deionized water, and the grinding medium is high-purity alumina ceramic balls to obtain a uniformly mixed slurry. The slurry is spray-dried and granulated to obtain a granulated material, and the granulated material is formed by cold isostatic pressing at a forming pressure of 100 MPa to obtain a blank body. The obtained blank body is processed into a ceramic ring with an inner diameter of 73mm, a thickness of 17mm, and a length of 30mm by a CNC preci...

Embodiment 2

[0026] Weigh 85% of α-alumina micropowder, 8% of aluminum titanate micropowder, 2% of magnesia and 5% of zirconia powder according to mass percentage, wherein α-alumina micropowder, aluminum titanate, magnesia The particle size is 4~5 microns, and the particle size of zirconia is 1~2 microns.

[0027] Put the weighed powder into the high-speed stirring mill, add HX-40Y ceramic dispersant, grind in the high-speed stirring mill for 1 hour, then add PVA binder, silicone defoamer, and grind for 2 hours, add The dispersion medium is deionized water, and the grinding medium is zirconia ceramic balls to obtain a uniformly mixed slurry. The slurry is spray-dried and granulated to obtain a granulated material, and the granulated material is formed by cold isostatic pressing at a forming pressure of 100 MPa to obtain a blank body. The obtained blank body is processed into the shape and size as in Example 1 by a CNC precision lathe, and the surface of the processed blank body is modifie...

Embodiment 3

[0032] Weigh 69% of α-alumina micropowder, 15% of aluminum titanate micropowder, 6% of magnesia and 10% of zirconia powder according to mass percentage respectively, wherein α-alumina micropowder, aluminum titanate, magnesia The particle size is 4~5 microns, and the particle size of zirconia is 1~2 microns.

[0033] Put the weighed powder into the high-speed stirring mill, add HX-40Y ceramic dispersant, grind in the high-speed stirring mill for 1 hour, then add PVA binder, silicone defoamer, and grind for 2 hours, add The dispersion medium is deionized water, and the grinding medium is high-purity alumina ceramic balls to obtain a uniformly mixed slurry. The slurry is spray-dried and granulated to obtain a granulated material, and the granulated material is formed by cold isostatic pressing at a forming pressure of 100 MPa to obtain a blank body. The obtained blank body is processed into the shape and size as in Example 1 by a CNC precision lathe, and the surface of the proce...

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Abstract

The invention discloses an alumina ceramic ring having high thermal shock resistance and used for a polycrystalline silicon reduction furnace as well as a preparation method of the alumina ceramic ring. The formula composition of the alumina ceramic ring comprises components in percentage by mass as follows: 69%-85% of alpha-alumina micro powder, 8%-15% of aluminum titanate, 2%-6% of magnesium oxide and 5%-10% of zirconium oxide, wherein the granularity of alpha-alumina micro powder, aluminum titanate, magnesium oxide and zirconium oxide is 4-5 micrometers, and the granularity of zirconium oxide is 1-2 micrometers. The alumina ceramic ring has good insulativity, high strength, high-temperature resistance and good thermal shock resistance, is resistant to acid-base corrosion and can meet the environment use requirements of the polycrystalline silicon reduction furnace; the service life of the ceramic ring can be greatly prolonged, and the working efficiency is improved.

Description

technical field [0001] The invention relates to an alumina ceramic ring and a preparation method thereof, in particular to an alumina ceramic ring with high thermal shock resistance for a polysilicon reduction furnace and a preparation method thereof, belonging to the technical field of inorganic non-metallic materials. Background technique [0002] Polysilicon reduction furnace is a special equipment for preparing polysilicon material by adopting "improved Siemens method". At present, the most mature technology for polysilicon production at home and abroad is the improved Siemens method, which obtains high-purity polysilicon through the chemical vapor deposition reaction of trichlorosilane and hydrogen under high temperature conditions, and produces a large amount of by-product silicon tetrachloride to be recycled. The most important equipment for preparing polysilicon by this method is the vapor phase deposition reactor (CVCD reactor), also known as the reduction furnace, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/10C04B35/622
Inventor 罗奕惠熊彪
Owner 景德镇晶达新材料有限公司
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