Adsorption carrier and adsorption method thereof

Abstract

The invention provides a sucking type carrier and a sucking method thereof. The sucking type carrier comprises a carrier body (1) and a plurality of vacuum sucking devices (2) capable of ascending and descending relative to the carrier body (1). The carrier body (1) is used for carrying a substrate (3), and a plurality of through stepped holes (11) are formed in the carrier body (1). Each vacuum sucking device (2) comprises a hollow support rod (21) and a vacuum cup (22) fixedly arranged at the top of the support rod (21). A vacuum pipeline (211) connected with vacuum pressure is arranged in each support rod (21). Each vacuum sucking device (2) is arranged in one stepped hole (11) correspondingly, is controlled independently and is capable of axially ascending and descending along the corresponding stepped hole (11), so that the vacuum sucking devices (2) can be positioned at different heights relative to the carrier body (1).

Description

technical field [0001] The invention relates to the field of flat panel display device manufacturing processes, in particular to an adsorption carrier and an adsorption method thereof. Background technique [0002] In the field of display technology, flat panel display devices such as Liquid Crystal Display (LCD) and Organic Light Emitting Diode (OLED) have gradually replaced CRT displays and become mainstream products in the market. Liquid crystal displays have many advantages such as thin bodies, power saving, and no radiation, and have been widely used, such as mobile phones, personal digital assistants (PDAs), digital cameras, computer screens or notebook computer screens. Compared with liquid crystal displays, organic electroluminescent displays have excellent characteristics such as self-illumination, no need for backlight, high contrast, thin thickness, wide viewing angle, fast response speed, and wide operating temperature range. They are recognized as the next gener...

AI Technical Summary

Problems solved by technology

[0005] However, in the production process of display panels, especially flexible display panels, due to factors such as high temperature in the previous process, the difference in shrinkage between the plastic film attached to the substrate and the substrate glass will inevitably lead to irregular warping of the substrate. And become uneven, such as warping around or arching in the middle, and as the size of the substrate increases, the degree of warping continues to increase

When the existing full-surface planar adsorption carrier encounters an uneven substrate, since the warped part on the substrate is far away from the vacuum adsorption hole on the carrier, vacuum adsorption cannot be established, resulting in the substrate not being tightly attached to the carrier. It cannot be stably fixed on the stage, and further, the uneven substrate surface will destroy the uniformity of the optical process and film forming process, directly affecting the quality of the display panel

In addition, the space between the action mechanisms inside some equipment is extremely limited. If the substrate is not flat, its warped position may collide during the production or transmission process, resulting in cracking of the substrate or even equipment damage.

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