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A kind of preparation method of solid lubricating ZNS thin film

A solid lubrication and thin film technology, which is applied in gaseous chemical plating, metal material coating technology, coating, etc., can solve the problems of ZnS solid thin film without breakthrough, and achieve excellent mechanical properties, easy control of parameters, and uniform particle distribution Effect

Active Publication Date: 2017-08-11
SHANGHAI NAT ENG RES CENT FORNANOTECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there has been no breakthrough in the ZnS solid film with lubricating effect.

Method used

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  • A kind of preparation method of solid lubricating ZNS thin film
  • A kind of preparation method of solid lubricating ZNS thin film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] (1) Put Si, which has been strictly cleaned on the surface, as the substrate, put it into the ALD deposition chamber, heat it to 150°C, and set diethylzinc Zn(C 2 h 5 ) 2 The pulse time of the source is 0.1 seconds, and the flushing time is 3 seconds; H 2 The pulse time of the S gas source was 10 seconds and the flush time was 15 seconds. In this implementation case, the number of deposition cycles is 300.

[0018] (2) The obtained ZnS thin film was exposed to 20% H 2 S and N 2 The vulcanization annealing was carried out under the mixed atmosphere, the temperature was 500°C, and the annealing time was 120 minutes.

[0019] figure 1 This is the SEM image of ZnS obtained after sulfidation annealing; the grain distribution of the film is uniform after sulfidation annealing.

[0020] figure 2 Friction test graphs obtained for ZnS thin films after sulfurization annealing. The test conditions are: a steel ball with a diameter of 4mm under a load of 50g; reciprocatin...

Embodiment 2

[0022] (1) Put Si, which has been strictly cleaned on the surface, as the substrate, put it into the ALD deposition chamber, heat it to 120°C, set diethylzinc Zn(C 2 h 5 ) 2 The pulse time of the source is 0.2 s and the flush time is 8 s; H 2 The pulse time of the S gas source was 5 seconds and the flush time was 10 seconds. In this implementation case, the number of deposition cycles is 200.

[0023] (2) The obtained ZnS thin film was exposed to 30% H 2 S and N 2 The vulcanization annealing is carried out under the mixed atmosphere, the temperature is 500°C, and the annealing time is 90 minutes.

Embodiment 3

[0025] (1) Put Si, which has been strictly cleaned on the surface, as the substrate, put it into the ALD deposition chamber, heat it to 180°C, and set diethylzinc Zn(C 2 h 5 ) 2 The pulse time of the source is 0.3 s and the flush time is 8 s; H 2 The pulse time of the S gas source was 15 seconds and the flush time was 20 seconds. In this implementation case, the number of deposition cycles is 400.

[0026] (2) The obtained ZnS thin film was exposed to 40% H 2 S and N 2 The vulcanization annealing is carried out under the mixed atmosphere, the temperature is 500°C, and the annealing time is 60 minutes.

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Abstract

The invention relates to a method for preparing a solid lubricating ZnS thin film. The strictly cleaned substrate is put into the cavity of an atomic layer deposition system (ALD), and diethyl zinc (Zn(C 2 h 5 ) 2 ) liquid metal source and H 2 S gas sulfur source to prepare ZnS thin film; the obtained ZnS thin film is treated by sulfuration annealing process to obtain solid lubricating ZnS thin film. The method of the invention adopts the atomic layer deposition process, can control the thickness of the ZnS thin film well, and improves the utilization rate of the metal source and the gas source. The technological parameters of the vulcanization system are perfect, and in a small amount of H 2 The vulcanization and annealing steps can be completed under S; the prepared ZnS thin film particles are evenly distributed, the mechanical properties are excellent, and the friction coefficient can be stabilized on the order of 0.1. The preparation method involved in the invention has easy controllable parameters and high repeatability, and is suitable for industrialized production environment.

Description

technical field [0001] The invention relates to a solid lubricating film, in particular to a preparation method and application of a solid ZnS film with lubricating effect. Background technique [0002] About one-third of the primary energy is consumed by the friction process every year. In the industrial field, about 80% of the failures of machine parts are caused by wear. Therefore, reducing friction and wear has important social and economic benefits for saving energy and resources, alleviating environmental pollution, and improving the ecological environment. [0003] Compared with the maturity of liquid lubrication research, solid lubricant materials mainly focus on layered structure materials represented by graphene, including single-layer graphene, molybdenum disulfide, titanium disulfide, etc. Researchers have praised graphene as the thinnest solid lubricant material (ACS Nano, 2011, vol. 5 (6), pp 5107–5114), and applied it to reduce the friction coefficient of ste...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/30C23C16/455
Inventor 何丹农卢静李争尹桂林
Owner SHANGHAI NAT ENG RES CENT FORNANOTECH
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