Solar cell resisting potential-induced degradation and preparation method thereof
A potential-induced attenuation, solar cell technology, applied in the field of solar cells, can solve the problems of poor battery anti-potential-induced attenuation performance, unsatisfactory battery anti-potential-induced attenuation performance, affecting power output of power stations, etc., to improve battery conversion efficiency, The effect of improving the anti-potential induced decay performance
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[0049] Correspondingly, see figure 2 , the invention provides a method for preparing a solar cell resistant to potential-induced decay, comprising:
[0050] S101, forming a textured surface on the front surface of the silicon wafer, where the silicon wafer is P-type silicon.
[0051] The textured surface of the silicon chip adopts HF and / or HNO 3 solution to form an ideal suede structure and reduce reflectivity.
[0052] S102, performing diffusion on the front surface of the silicon wafer to form an N-type emitter.
[0053] The N-type emitter can be formed by methods such as thermal diffusion or ion implantation, wherein the diffusion of the silicon wafer is preferably made of phosphorus oxychloride.
[0054] S103, removing the phosphosilicate glass formed in the diffusion process.
[0055] Removing the phosphosilicate glass is beneficial to ensure the photoelectric conversion efficiency of the battery.
[0056] S104, using short-wavelength UV ultraviolet radiation on th...
Embodiment 1
[0067] Forming a suede surface on the front side of the silicon wafer, the silicon wafer is P-type silicon;
[0068] Diffusion is performed on the front side of the silicon wafer to form an N-type emitter;
[0069] Removal of phosphosilicate glass formed by the diffusion process;
[0070] Use short-wavelength UV ultraviolet radiation on the front of the silicon wafer, and pass oxygen and nitrogen to prepare a silicon oxide layer with a refractive index of 2.35 and a thickness of 1nm. The reaction temperature is 50°C, the oxygen flow rate is 15L / min, and the nitrogen flow rate is 10L / min, deposition time 8s;
[0071] On the front side of the silicon wafer, using the PECVD method, first pass the reaction gas NH 3 3.5 slm and SiH 4 900 sccm, the reaction time is 200 s to form the first layer of silicon nitride film; then, change the NH 3 and SiH 4 flow, the NH 3 Flow rate is set to 4.5 slm, SiH 4 The flow rate is set to 500 sccm, the reaction time is 390s, and the second...
Embodiment 2
[0076] Forming a suede surface on the front side of the silicon wafer, the silicon wafer is P-type silicon;
[0077] Diffusion is performed on the front side of the silicon wafer to form an N-type emitter;
[0078] Removal of phosphosilicate glass formed by the diffusion process;
[0079] Use short-wavelength UV ultraviolet radiation on the front of the silicon wafer, and pass oxygen and nitrogen to prepare a silicon oxide layer with a refractive index of 2.37 and a thickness of 2nm. The reaction temperature is 52°C, the oxygen flow rate is 17L / min, and the nitrogen flow rate is 12L / min, deposition time 9s;
[0080] On the front side of the silicon wafer, using the PECVD method, first pass the reaction gas NH 3 3.7 slm and SiH 4 950 sccm, reaction time 205 s to form the first layer of silicon nitride film; then, change the NH 3 and SiH 4 flow, the NH 3 Flow rate is set to 4.8 slm, SiH 4The flow rate is set to 600 sccm, the reaction time is 400s, and the second layer o...
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