Substrate structure for monolithic optical detection and electric signal processing integrated device and forming method thereof
A technology for integrating devices and photodetectors, applied in electrical components, semiconductor devices, circuits, etc., can solve the problem of lack of monolithic integration solutions, and achieve the effect of solving the problem of monolithic integration of electronic devices
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0030] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0031] figure 1 It is a schematic diagram of the substrate structure for a monolithic optical detection and electrical signal processing integrated device. The substrate structure for a monolithic optical detection and electrical signal processing integrated device according to the present invention includes a low-resistance semiconductor material 1, a high-resistance semiconductor Material 2, depletion suppression region 3, device epitaxial layer 4, electronic device region 5, photoelectric isolation dielectric region 6, photoelectric isolation channel blocking region 7 and photodetector ohmic contact region 8;
[0032] The photoelectric isolation dielectric region 6 is connected to the photoelectric isolation channel blocking region 7, and the epitaxial layer 4 of the device is isolated; the distance D1 between the left side of the photoe...
PUM
Property | Measurement | Unit |
---|---|---|
Thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com