Getter for purifying krypton and xenon, and preparation method of getter

Abstract

The invention relates to a multi-element alloy getter for purifying krypton and xenon, and a preparation method of the getter, and the getter can be used for solving the problems that the existing getter is poorer in pertinence, insufficient in handling capacity, high in energy consumption, easy in pulverization and short in service life, and the like. The multi-element alloy getter comprises the following components: 50-65% of zirconium, 10-20% of aluminum, 5-10% of iron, 2-10% of titanium, 3-5% of lanthanum, 3-5% of silicon and the balance of unavoidable impurities. The method comprises the steps of pretreatment of alloy simple substances, alloy smelting and alloy crushing. The getter can meet the purity requirement of high-purity krypton and xenon (99.999%), is large in fluctuation ranges of anti-raw gas fluorocarbon and oxygen nitrogen compound, large in raw gas impurity adsorption capacity, high in raw gas impurity removal depth, wide in service temperature range (300-1000 DEG C) and long in service life, and is not pulverized.

Description

technical field [0001] The invention relates to the field of gas purification, in particular to a getter for purifying krypton and xenon and a preparation method thereof. Background technique [0002] With the rapid development of electronic industry and modern science and technology at home and abroad, the purity requirements of krypton and xenon gas have been further improved. The quality of krypton and xenon products stipulated in the national standard of krypton and xenon in 1995 has been unable to meet the requirements of the high-end optoelectronic market and the development of modern science and technology. For this reason, Wuhan Iron and Steel Oxygen Co., Ltd. was entrusted by the National Gas Standards Committee as the first drafting unit and the first drafter to revise the latest national standards: "Krypton" (GB / T5829-2006), "Xenon" (GB / T5828-2006), this standard sets strict requirements on the content of individual impurities (especially fluorocarbons) in krypto...

AI Technical Summary

Problems solved by technology

[0004] At the same time, in the face of the increasingly high content of fluorocarbons and oxygen nitrogen compounds in krypton-xenon raw materials and more stringent national standards, the existing alloy getters have poor pertinence, insufficient processing capacity, large loss, and easy powder chemical, resistance to raw gas fluorocarbons, small fluctuation range of oxygen and nitrogen compounds, and short service life. For example, patent No. 001345429.9 mentions that the getter belt used in the getter pump is Binary Alloy ZrAl 16 , but ZrAl 16 When the getter is applied to krypton-xenon gas to purify fluorocarbons, the krypton-xenon gas with a content of 20-220ppm has problems of insufficient processing capacity, large loss, easy pulverization, and short service life.

Another example is the alloy getter of patent No. CN 1429658A. Although the purified krypton-xenon product quality can meet the requirements of the 1995 national standard, it cannot meet the 99.999% purity requirements of the 2006 new national standard for high-purity krypton and xenon.

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