Wafer testing machine stand

Abstract

The invention provides a wafer testing machine stand. Crystal grains on a wafer can be detected via movement of a probe base without rotating movement of the wafer so that detection can be performed more stably and rapidly, possible emergent situations can be reduced, cost and expense of testing machines and tools can be reduced and time for setting the machines and the tools can also be reduced.

Description

technical field [0001] The present invention relates to a wafer testing machine, in particular to a wafer testing machine for fast and stable testing of crystal grains. Background technique [0002] In the semiconductor process, wafer processing (Waferfabrication) is the most capital-intensive and technology-intensive part, and the upstream industry accompanying wafer processing includes product design (ICdesign), wafer manufacturing (Wafermanufacture), and mask (Photomask) ) manufacturing, etc., the downstream industry includes IC packaging (Packaging), testing (Testing), packaging (Assembly) generally known as semiconductor back-end processes (Back-end processes), and peripheral lead frame manufacturing (Lead-frame manufacture), connection Connectormanufacture, boardmanufacture, etc. This closely integrated industrial system has formed the lifeline of Taiwan's economy today. [0003] Each process usually includes several inspection steps to detect the status of the curren...

AI Technical Summary

Problems solved by technology

[0005] However, when inspecting hundreds of dies, the probes on the wafer testing machine are usually kept fixed, and the wafer below is used to rotate and move, so it is easy to cause poor stability during wafer testing. There are many emergencies, which will increase the cost and the cost of testing equipment; in addition, when setting the test, it will also take more time to set up the equipment

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