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A radial zero additional force turntable

An additional force and turntable technology, which is applied in the direction of photolithography process exposure device, microlithography exposure equipment, etc., can solve the problem of not meeting the requirements of axis stability, and achieve the effect of simple structure

Inactive Publication Date: 2016-08-31
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The traditional rotary table usually adopts worm gear drive, friction wheel drive, gear drive, chain drive and belt pulley drive, etc. The direct configuration of such mechanisms on the rotary table will have a large additional force on the rotary shaft, resulting in an additional center of rotation. The yaw and translation cannot meet the stability requirements of the axis

Method used

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  • A radial zero additional force turntable
  • A radial zero additional force turntable
  • A radial zero additional force turntable

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Embodiment Construction

[0024] In order to make the above objects, features and advantages of the present invention more obvious and understandable, the specific implementation of the present invention will be described in detail below.

[0025] Such as figure 1 , figure 2 , image 3 As shown, a radial zero additional force turntable of the present invention consists of a base 10, a bearing end cover 11, a cover plate 12, a friction wheel 13, a bearing 14, a stepped shaft 15, a small bearing 16, a gasket 17, a shaft pin 18, Motor 30, motor base 31, shaft coupling 32, fixed bearing 33, roller seat 34, roller 35, support bearing 36, retaining ring 37, spacer 38, workbench 50, code disc 51 and rotating disc 52 form. Wherein the base 10, bearing end cover 11, cover plate 12, friction wheel 13, bearing 14, step shaft 15, small bearing 16, gasket 17, shaft pin 18, motor 30, motor seat 31, coupling 32, fixed Bearing 33, roller seat 34, roller 35, support bearing 36, retaining ring 37 and pad 38 form the...

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Abstract

The invention discloses a radial zero additional force turntable, comprising a base, a bearing end cover, a front panel, a friction wheel, a bearing, a stepped shaft, a small bearing, a shaft pin, a gasket, a motor, a motor seat, a shaft coupling, Fixed bearings, roller housings, rollers, support bearings, retaining rings, spacers, tables, code discs, and turntables. Among them, base, bearing end cover, front panel, friction wheel, bearing, stepped shaft, small bearing, shaft pin, motor, motor seat, coupling, fixed bearing, roller seat, roller, supporting bearing, retaining ring and spacer The driving mechanism of the turntable is composed; the workbench, the code disc and the turntable form the guiding and measuring mechanism of the turntable. The driving mechanism realizes the coupling through the bearing and the "U-shaped groove" on the turntable, and then realizes the rotary drive of the worktable of the turntable, and at the same time does not increase the radial driving force of the worktable to ensure the rotation stability of the worktable.

Description

technical field [0001] The invention relates to the technical field of a turntable drive mechanism used in the photolithography field, in particular to a radial zero additional force turntable drive mechanism. It can realize the rotary drive with zero additional force in the radial direction, and realize the high stability of the rotation center of the turntable, including the yaw and translation of the rotation center. Background technique [0002] In the field of lithography or the test platform configured for lithography, in order to reduce the complexity and cost of the system, the system is usually not equipped with a focus adjustment platform. When the system is equipped with a rotary table, the stability of the rotation center of the rotary table is very high. The requirements of high deflection accuracy and center translation accuracy are usually within a few seconds of deflection and center translation within 1um. [0003] The traditional rotary table usually adopt...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 周清华胡松
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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