A device and method for surface modification of micro-nanoparticles

A micro-nano particle and surface modification technology, applied in the fields of nanotechnology, nanotechnology, nanotechnology, etc. for materials and surface science, which can solve the problem that the advantages of high uniformity of atomic layer deposition cannot be fully exerted and precursors are not fully utilized. , powder particles are difficult to disperse and other problems, to achieve the effect of promoting sufficient and uniform adsorption, improving deposition uniformity and adequacy, and increasing the area

Active Publication Date: 2016-08-17
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] At present, the existing equipment or methods for surface modification of powder particles mainly adopt the fluidization method. However, since the atomic layer deposition technology is rooted in the traditional planar thin film growth technology, the applicability of the existing devices and methods for the surface deposition of micro-nano particles is still limited. It needs to be further improved, mainly because there is a significant difference compared with the flat substrate deposition process, and the powder particles are difficult to disperse due to agglomeration during the deposition process, which causes the advantages of high uniformity of atomic layer deposition to not be fully utilized in particle surface coating , the coating efficiency is low, and the precursor utilization may not be sufficient

Method used

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  • A device and method for surface modification of micro-nanoparticles
  • A device and method for surface modification of micro-nanoparticles
  • A device and method for surface modification of micro-nanoparticles

Examples

Experimental program
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Effect test

Embodiment 1

[0082] For AlH with a particle size of 50μm 3 The particle surface is coated with a layer of 10nm thick Al 2 O 3 The film reduces its impact sensitivity and improves safety. Select trimethyl aluminum (TMA) and water (H 2 O) is the precursor, its Mainly against The response equation is:

[0083] (A)AlOH * +Al(CH 3 ) 3 →AlOAl(CH 3 ) 2 * +CH 4

[0084] (B)AlCH 3 * +H 2 O→AlOH * +CH 4

[0085] Using the above-mentioned micro-nano particle surface modification device and the corresponding pressure-holding deposition process method:

[0086] 0.1g AlH 3 The particles are put into the powder particle loading device and installed in the reaction chamber, and connected with the magnetic fluid sealing device. Then the reaction chamber is sealed.

[0087] Turn on the vacuum pump, open the solenoid valve and the throttle valve to connect the reaction chamber with the vacuum pump, and pump the pressure of the reaction chamber to less than or equal to 1pa. Heat the reaction chamber to stabilize ...

Embodiment 2

[0091] For SiO with a particle size of 200nm 2 The particle surface is coated with a layer of 5nm thick Al 2 O 3 Thin film to study SiO 2 The surface structure of the particles. Select trimethyl aluminum (TMA) and water (H 2 17 O) is the precursor.

[0092] Using the above-mentioned micro and nano particle surface modification device and the corresponding balanced dispersion deposition process method:

[0093] SiO 2 The particles are put into the powder particle loading device and installed in the reaction chamber, and connected with the magnetic fluid sealing device. Then the reaction chamber is sealed.

[0094] Turn on the vacuum pump, open the solenoid valve and the throttle valve to connect the reaction chamber with the vacuum pump, and pump the pressure of the reaction chamber to less than or equal to 1pa. Heat the reaction chamber to stabilize the internal temperature at 200°C, and heat the precursor cylinder, the precursor branch pipeline, and the precursor quick response va...

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Abstract

The invention discloses a device for surface modification of micro-nano particles, comprising: a reaction chamber, the cavity formed inside of which is used as a reaction space for precursors and micro-nano particles; multiple precursor supply devices, which respectively pass The pipeline communicates with the reaction chamber to provide different precursors; the carrier gas delivery system, the precursor is delivered to the reaction chamber through the carrier gas output by the carrier gas delivery system; and the powder particle loading device is used to carry the to-be-modified Micro-nanoparticles; the precursors are alternately delivered to the reaction chamber through multiple precursor supply devices, and enter the rotating powder particle loading device to contact the surface of the micro-nanoparticles for atomic layer deposition reaction, so that the micro-nanoparticles A coating film is formed on the surface to achieve surface modification. The invention also discloses a method for modifying the surface of micro-nano particles by using the device. The invention can obtain a coating layer with high uniformity on the surface of the particles, and improve the overall coating rate of the powder particles and the utilization rate of the precursor.

Description

Technical field [0001] The invention belongs to the technical field of powder particle surface coating, and specifically relates to a device and method for surface modification of micro and nano particles. Background technique [0002] Compared with bulk materials, powder granular materials have a large specific surface area and high surface activity, and have small size effects, surface effects and quantum tunneling effects that traditional solid materials do not have. They cause changes in structure and energy state, and can produce many Unique physical and chemical properties of light, heat, electricity, magnetism, mechanics, catalysis, etc. [0003] Because of its huge specific surface area, through appropriate surface modification, its excellent performance can be further expanded and improved. The main method of surface modification of micro / nano particles is to coat the surface of the particles with a thin film as needed to form a core-shell structure. Such a structure can...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/455B82Y40/00B82Y30/00
Inventor 陈蓉段晨龙刘潇曹坤单斌文艳伟
Owner HUAZHONG UNIV OF SCI & TECH
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