Preparing method of amorphous silicon membrane light trapping structure for solar cell

Abstract

The invention discloses a preparing method of an amorphous silicon membrane light trapping structure for a solar cell, the reflectivity of a membrane can be reduced. The preparing method comprises the first step of cleaning a substrate, the second step of depositing an amorphous silicon membrane on the surface of the substrate, the third step of carrying out nanosecond laser scanning on the amorphous silicon membrane deposited on the surface of the substrate, and the light trapping structure is formed on the surface of the amorphous silicon. Due to the fact that the amorphous silicon membrane is scanned through a nanosecond laser, an obvious peak structure can be formed on the surface of the amorphous silicon membrane, the reflectivity of the amorphous silicon membrane can be greatly reduced, the smallest reflectivity in the wavelength raging from 300 nm to 1100 nm can reach to 0.8 percent, the reflectivity reducing effect is obvious, broadband spectrum reflectivity reducing in the whole solar radiation spectral region is basically achieved, the suede light trapping structure prepared with the method has the advantages that large-area preparing is easy to carry out, the production technology is mature, and cost is low, and the preparing method is suitable for being applied and popularized in the technical field of semiconductor manufacturing.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a method for preparing an amorphous silicon thin film light-trapping structure used for solar cells. Background technique [0002] A solar cell is a semiconductor device that directly converts the sun's light energy into electricity. Because it does not need water, oil, fuel, etc., it can generate electricity as long as there is light, so it can be called the cleanest and most environmentally friendly renewable energy in the world today. Based on the infinite and stable solar energy, it also has high security. Therefore, solar cells will undoubtedly become one of the main options for new energy utilization. [0003] Light trapping is one of the key technologies to improve light absorption and thus efficiency of thin-film solar cells. Light trapping measures mainly adopt evaporation anti-reflection film or prepare suede on the surface. From the perspective o...

AI Technical Summary

Problems solved by technology

Although the suede surface made by etching the surface of single crystal silicon can achieve the purpose of increasing light absorption by increasing light scattering in the crystalline silicon layer, more than 30% of the light energy is still due to the difference in refractive index between air and crystalline silicon. while lost by reflection

And other methods such as the preparation method of a polycrystalline silicon solar cell suede disclosed by CN1983645A, the reflectivity under wavelength 400-1000nm is also more than 20%, and the reflectivity of amorphous silicon thin film is higher, causes the amorphous silicon solar cell Light absorption efficiency is low

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