Secondary cold trap enrichment and GC-FID (Gas Chromatography-Flame Ionization Detector) combining device and method for detecting trace hydrogen phosphide
A GC-FID and secondary cold trap technology, applied in the field of phosphine detection, can solve the problems of low phosphine content and late start of phosphine research, achieve economical price, reduce operation difficulty and economic cost, and operate convenient effect
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Embodiment 1
[0020] Such as figure 1 As shown, a kind of secondary cold trap enrichment combined with GC-FID device for detecting trace amounts of phosphine in this embodiment includes a cold trap secondary enrichment system and a GC-FID analysis system. The trap secondary enrichment system is composed of a sample sampling device 1, a six-way valve 2, a primary cold trap 3 and a secondary cold trap 4, and a temperature online detector 5 is set in the primary cold trap and the secondary cold trap; the GC- The FID analysis system consists of a gas phase sampler 6, a chromatographic column 7, a flame ionization detector (FID) 8 and a carrier gas system 9 of the GC-FID analysis system. Sample injection device, port ② is the exhaust gas discharge port, port ③ is connected to the inlet of the secondary cold trap, port ④ is connected to the carrier gas system of the GC-FID analysis system, port ⑤ is connected to the outlet of the primary cold trap, port ⑥ The inlet of the primary cold trap is co...
Embodiment 2
[0024] A secondary cold trap enrichment and GC-FID combined device for detecting trace amounts of phosphine in this embodiment includes a cold trap secondary enrichment system and a GC-FID analysis system, and the cold trap secondary enrichment The system consists of a sample sampling device, a six-way valve, a primary cold trap and a secondary cold trap. A Pt100 thermal resistance temperature detector is installed in the primary cold trap and the secondary cold trap. The length of the primary cold trap and the secondary cold trap is 100cm , 0.53mm in diameter, filled with Al 2 o 3 -Na 2 SO 4 The enrichment capillary column and the cold trap cup are composed of the capillary column placed in the cold trap cup, liquid nitrogen is poured into the cold trap cup, the cold trap cup is placed on the lifting platform, and the liquid nitrogen liquid in the cold trap cup is adjusted by the lifting platform The distance between the surface and the capillary column is used to realize ...
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