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Preparation method of lubricating film

A technology of lubricating thin film and thin film layer is applied in the field of preparation of lubricating thin film, which can solve the problems of high cost, high production cost, and the resolution cannot be well solved, and achieves the effect of satisfying pattern transfer, high resolution and low cost.

Inactive Publication Date: 2014-08-13
SUZHOU JINFU TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Using the existing technology to prepare micro-nano structures on thin films requires expensive optical system equipment, and its production cost is high; due to the diffraction phenomenon in photolithography exposure, the resolution cannot be well resolved

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Embodiment 1

[0044] Embodiment 1: A preparation method of a lubricating film, using ultraviolet hardening imprint lithography (UV-NIL), depositing a silicon-doped diamond-like film on a silicon substrate to prepare a nanometer pattern.

[0045] See attached figure 1 First, the surface of the film layer 1 is treated, and the dust and foreign matter on the surface are blown off with high-purity nitrogen gas for about 1 minute; then the SU-8 photoresist is spin-coated on the surface of the film layer with a thickness of about 500nm, and the spin The sample coated with SU-8 photoresist was exposed under a 1000W ultraviolet lamp for 1 minute, and then the exposed sample was cured by heating at 110°C for 5 minutes to form an intermediate layer 2; then, the cured sample was spin-coated with UV curable adhesive, The thickness is 200nm to form a UV-curable nano-imprint adhesive layer 3; then cover the entire sample with a soft imprint film 4 with a structure, and expose the fully covered sample to ...

Embodiment 2

[0048] Embodiment 2: A method for preparing a lubricating film, using ultraviolet hardening imprint lithography (UV-NIL), depositing a silicon-doped diamond-like film on the surface of a warped sapphire substrate to prepare a nano-pattern.

[0049] First, the surface of the curved substrate is treated, and the dust and foreign matter on the surface are blown off with high-purity nitrogen for about 1 minute; then the SU-8 photoresist is spin-coated on the surface of the film layer with a thickness of about 400nm, and the spin-coating The sample of SU-8 photoresist was exposed under a 1000W ultraviolet lamp for 1 minute, and then the exposed sample was cured by heating at 110°C for 5 minutes to form an intermediate layer; then, the cured sample was spin-coated with UV curable adhesive, with a thickness of 150nm to form a UV-curable nano-imprint adhesive layer; then cover the entire sample with a soft imprint film plate with a structure, and expose the fully covered sample to a 10...

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Abstract

The invention discloses a preparation method of a lubricating film. The preparation method comprises the steps of pretreating a film layer on the surface of a substrate; carrying out spin coating on a photoresist, heating, and then carrying out ultraviolet-curing to form a middle layer; forming an ultraviolet-cured nano embossing rubber layer; pressing a soft embossing template in the ultraviolet-cured nano embossing rubber layer, exposing under an ultraviolet lamp; etching to remove ultraviolet-cured nano embossing rubber left on an unexposed place, exposing the middle layer; etching the middle layer by taking the ultraviolet-cured nano embossing rubber layer as a mask layer, and exposing a thin film layer, etching the film layer by using the ultraviolet-cured nano embossing rubber layer and the middle layer as mask layers so as to form a micro-nano structure on the film layer; and removing the ultraviolet-cured nano embossing rubber layer and the middle layer to obtain the required lubricating thin film. According to the preparation method, by using a soft embossing and nano embossing compounding technology, the required pattern is effectively transferred on the film, and the lubricating film with the micro-nano structure can be prepared on an irregular non-plane. The preparation method has the characteristics of high efficiency, low cost and high resolution.

Description

technical field [0001] The invention relates to a method for preparing a film, in particular to a method for preparing a lubricating film with a micro-nano structure on the surface. Background technique [0002] Studies have shown that in tribological systems, the friction force is not completely proportional to the surface roughness. For example, in the mechanical transmission pair, when the surface roughness of the sliding parts reaches the micro-nanometer or atomic level, the friction force will increase greatly. The preparation of biomimetic microstructures on the surface of materials (including surface micropits, surface microprotrusions, surface textures, and non-smooth surfaces) can effectively improve the tribological properties of sliding surfaces. For example, in 1991, Ranjan used laser technology to process a dot matrix composed of pits with a diameter of 20 microns and a depth of about 10 nanometers in the start-stop area of ​​the computer hard disk, successfull...

Claims

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Application Information

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IPC IPC(8): G03F7/00B81C1/00
Inventor 李丰邓萌萌石振杨立梅
Owner SUZHOU JINFU TECH
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