MEMS accelerometer
An accelerometer and acceleration technology, applied in speed/acceleration/shock measurement, acceleration measurement using inertial force, testing/calibration of speed/acceleration/shock measurement equipment, etc., can solve common mode error, accelerometer instability, Problems such as the increase in the variation of differential capacitance can achieve the effect of ensuring resolution, increasing detection capacitance and detection accuracy, and increasing discrimination
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0030] Below in conjunction with accompanying drawing, the present invention is described in further detail:
[0031] refer to figure 1 According to a MEMS accelerometer provided by the present invention, it includes: a substrate 1 and an acceleration sensitive chip 3 and an integrated circuit 2 arranged on the substrate 1, the MEMS accelerometer also includes a tube shell 4, and the tube The shell 4 is provided with wiring pins 51 ; the acceleration sensitive chip 3 is connected with the integrated circuit 2 through the tube shell 4 .
[0032] refer to figure 2 , the acceleration sensitive chip includes a plurality of measuring bodies 31, and each measuring body 31 includes: a mass block 32 and a comb structure 33, and the plurality of measuring bodies 31 are connected to each other through the vertical mass block 36; the comb teeth The structure 33 includes movable comb teeth 34 extending from the mass block 32 , and fixed comb teeth 35 spaced apart from the movable comb t...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com