A Hydrostatic Bearing Used in Optical Plane Polishing Machine Tool

Abstract

The invention discloses a hydrostatic pressure bearing used for an optical plane polishing machine tool, which is mainly used as a rotating bearing of an ultra-precision machining polishing machine tool, and can also be used as a rotating bearing of a similar machine tool. Its main technical scheme: a circular boss turntable is connected with the intermediate turntable to form a rotating body, the rotating body is connected with the polishing disc, and the intermediate turntable is installed on the lower pressure plate and the L In the cylindrical space between the bearing bases, the intermediate turntable leaves gaps on both sides of the space, so that the hydraulic oil can pass through to form a hydraulic friction pair. The trial of the invention proves that the phenomenon that the original flat polishing machine tool is not suitable for processing high-precision optical elements and the production efficiency is relatively low is fundamentally overcome. Achieve ultra-precision machining of various planar optical components, effectively improve production efficiency, reduce costs, and meet the needs of mass production.

Description

technical field [0001] The invention belongs to a mechanism of mechanical equipment, which is mainly used for the rotating bearing of a polishing machine tool for ultra-precision processing of various planar optical elements, crystal elements and electronic display elements. It can also be used as a rotary bearing for similar machine tools. Background technique [0002] Usually, the surface polishing machine tools at home and abroad mainly adopt rolling bearing structure or sliding bearing structure, such as figure 1 As shown, the mechanism is mainly composed of rolling bearing a, polishing disc b, workpiece c, motor d, pulley e, transmission shaft f, upper plate g, oil hole h and so on. Its working principle: the motor d is connected to the drive shaft f through the pulley e, and drives the polishing disc b and the workpiece c to rotate together. At the same time, the oil hole h supplies oil to the rolling bearing a through the oil passage (the arrow represents the flow d...

AI Technical Summary

Problems solved by technology

However, due to the use of thrust bearings, the axiality and radiality will affect each other and improve the radial performance. This has an impact on the axial performance of high-precision optical components, which is very important for the processing of high-precision optical components. unfavorable

The plane polishing machine tool with this kind of bearing structure can process optical elements with general precision, but it is not suitable for the processing of high-precision optical elements. There are serious out-of-tolerance phenomena, low pass rate, low production efficiency, and noise Big and other problems, can not meet the needs of users

The reason is that even high-precision rolling bearings and sliding bearings will have vibration and poor wear resistance, which is the direct cause of inability to perform ultra-precision machining

And the imported bearings are very expensive

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