High temperature tail gas anti-impact piece adjustable structure of polycrystalline silicon high temperature tail gas heat exchanger

Abstract

The invention relates to a high temperature tail gas anti-impact piece adjustable structure of a polycrystalline silicon high temperature tail gas heat exchanger. The structure comprises a column end cap (1), a spiral hole calandria (2) and a fixing connecting piece (3), wherein the column end cap (1) is in threaded connection with inner holes in one end of the spiral hole calandria (2); the fixing connecting piece (3) is in threaded connection with the other end of the spiral hole calandria (2); a plurality rows of spiral holes are formed in the wall of the spiral hole calandria (2). By adopting the structure, an anti-impact piece is high temperature resisting and corrosion resisting, the flowing speed of a high temperature inlet tail gas can be controlled so as to uniformly distribute the high temperature tail gas, an ideal heat exchange effect is achieved, and the service life of the polycrystalline silicon high temperature tail gas heat exchanger is prolonged.

Description

technical field [0001] The invention relates to the field of polysilicon, in particular to an adjustable structure of a high-temperature tail gas anti-shock part of a polysilicon high-temperature tail gas heat exchanger. It belongs to the technical field of polysilicon preparation. Background technique [0002] Polycrystalline silicon is the direct material for the production of monocrystalline silicon. High-purity polysilicon is the basic material of semiconductor devices such as photoelectric conversion cells and integrated circuits. With the rapid development of the world's semiconductor industry, a large number of applications of ultra-large integrated circuits, and a large demand for photovoltaic cells, the world's demand for polysilicon is increasing year by year. [0003] In the process of polysilicon production, the exhaust gas outlet temperature of the reduction furnace and other equipment is as high as 1000°C, and it is high-temperature corrosive. In order to red...

AI Technical Summary

Problems solved by technology

[0005] 1. Metal anti-shock parts cannot resist high temperature corrosion and have a short life;

[0006] 2. The metal anti-shock plate cannot adjust the flow rate of the gas, which makes the heat exchange insufficient;

[0007] 3. The gas cannot evenly pass through the surface of the heat exchange tube, and the exhaust gas at the outlet is too high

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