time-of-flight mass analyzer

Abstract

A thin metal plate (113) and two prismatic-bar-shaped metal members (112) that are parallel to each other are alternately and repeatedly stacked, and the stack is sandwiched between two thick metal plates (111). Each contact surface is bonded to the counterpart surface by diffusion bonding to form an integrated multilayer body (110). The multilayer body (110) is cut at predetermined intervals at planes perpendicular to the thin metal plates (113), whereby a grid-like electrode (100) is completed, with the thin metal plates (113) serving as crosspieces (101) and the metal members (112) serving as spacers for defining a gap which serves as openings (102). With this configuration, it is possible to increase the thickness of the crosspieces (101) to increase the mechanical strength while keeping the width and the interval of the crosspieces (101) small. The penetration of an electric field from a flight space into an ion-accelerating region can also be suppressed, so that a leakage of ions from the ion-accelerating region into the flight space can also be prevented during an ion-introducing process.

Description

technical field [0001] The present invention relates to a time-of-flight mass spectrometer (Time-of-Flight Mass Spectrometer, hereinafter referred to as "TOFMS"). Grid-like electrodes for deceleration. Background technique [0002] In TOFMS, ions derived from sample components are given constant kinetic energy to fly a fixed distance in space, the time required for the flight is measured, and the mass-to-charge ratio of the ions is obtained from the flight time. Therefore, when ions are accelerated to start flying, if there is a deviation in the position of the ion and the initial energy of the ion, the time of flight of the ion with the same mass-to-charge ratio will deviate, resulting in a decrease in mass resolution and mass accuracy. . As one of the methods for solving such problems, there is known orthogonal acceleration (also referred to as vertical acceleration, orthogonal traction) that accelerates ions in a direction perpendicular to the incident direction of the ...

AI Technical Summary

Problems solved by technology

However, in the method described in Patent Document 1, the number of grid-shaped electrodes is increased, so there are problems such as an increase in cost and a decrease in ion transmittance.

On the other hand, in the method described in Patent Document 2, it is necessary to additionally provide a switch for voltage switching, so there is a problem of cost increase.

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