Photoconduction type X-ray detector based on high-resistance ZnO monocrystal and manufacturing method thereof

Abstract

The invention discloses a photoconduction type X-ray detector based on a high-resistance ZnO monocrystal. The photoconduction type X-ray detector based on the high-resistance ZnO monocrystal comprises a ZnO monocrystal substrate. The upper surface of the ZnO monocrystal substrate is plated with an upper electrode and a protection ring of an annular structure. The upper electrode is located in the middle of the protection ring. Uniform gaps are formed between the protection ring and the upper electrode. The lower surface of the ZnO monocrystal substrate is plated with a lower electrode. The upper electrode and the protection ring respectively comprise a first Al film layer and a first AZO film layer in sequence from top to bottom. The lower electrode comprises a second AZO film layer and a second Al film layer in sequence from top to bottom. The invention further provides a manufacturing method of the photoconduction type X-ray detector based on the high-resistance ZnO monocrystal. The photoconduction type X-ray detector which is based on the high-resistance ZnO monocrystal and manufactured through the manufacturing method has the advantages of being high in high-voltage resistance, low in noise and low in cost.

Description

technical field [0001] The invention belongs to the field of semiconductor nuclear radiation detection devices, and in particular relates to a photoconductive X-ray detector based on a high-resistance ZnO single crystal and a preparation method thereof. Background technique [0002] With the continuous development of nuclear technology in energy, nuclear safety, medical and aerospace applications, traditional gas detectors, solid-state scintillator detectors, and narrow-bandgap semiconductor junction detectors are facing increased sensitivity and challenges in terms of materials and device technology. There are many challenges such as lifespan, room temperature and wider working temperature range, volume reduction, and cost reduction. This field urgently needs the exploration, research and application development of new radiation detection materials and devices that can meet specific requirements. Oak Ridge National Laboratory, Lawrence Livermore National Laboratory, Pacific...

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Problems solved by technology

However, the cost of preparing nuclear radiation detector-grade diamond artificial crystals is very expensive, which largely limits the application and development of diamond detectors in a wider range of fields.

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