A process for removing phosphosilicate glass from monocrystalline silicon solar cells

Abstract

The invention relates to a technology for removing phosphorosilicate glass of single crystalline silicon solar cells. The technology is used for removing phosphorosilicate glass formed on the surface of a silicon chip after diffusion. The technology is characterized by comprising the following steps: (1) impurities in six grooves of a groove-type PSG-removing cleaning machine are removed; (2) 100L of pure water is poured into an acid groove No.1, 16L of electronic pure hydrofluoric acid at the mass concentration of 49% is added, and 30L of pure water is then poured to finally obtain a hydrofluoric acid solution; a fast drain groove No.2, a groove No.3, a groove No.4, a groove No.5 and a groove No.6 are all fully filled with pure water; (3) a bucket filled with silicon chips is put into a feed inlet of a phosphorosilicate glass removing cleaning machine; (4) the groove-type PSG-removing cleaning machine is operated; and (5) the bucket is taken out after removing is finished and is rapidly placed into a drying machine for drying. According to the invention, phosphorosilicate glass formed during the silicon chip diffusion process can be removed so as to make the PSG-removed silicon chips meet technological requirements. Hydrophilic phenomenon on the surface of the silicon chips is avoided, and minority carrier lifetime after diffusion is prolonged.

Description

technical field [0001] The invention relates to a process for removing phosphosilicate glass from a monocrystalline silicon solar cell, which is used for removing the phosphosilicate glass formed on the surface of a silicon wafer after diffusion. Background technique [0002] Solar energy is an inexhaustible renewable energy source for human beings. It is also clean energy and does not produce any environmental pollution. In recent years, solar energy has been widely used by humans, especially in the field of photovoltaic power generation, which has developed rapidly. Solar cells are used to convert solar energy into electrical energy. The manufacturing process of solar cells is relatively complicated. During the phosphorus diffusion process, a layer of SiO2 containing phosphorus will be formed on the surface of the silicon wafer, which is called phosphosilicate glass (PSG). Phospho-silicate glass increases the recombination of electrons in the emission area, resulting in ...

AI Technical Summary

Problems solved by technology

[0003] However, the existing process cannot meet the requirements of dephosphorous silicon glass for 125*125mm physical metallurgical monocrystalline silicon solar cells, and there will be a phenomenon of hydrophilicity on the surface of the silicon wafer, which will seriously affect the performance of the battery.