Concentric-circle-type corrugated solar cell silicon substrate and manufacturing process thereof

A solar cell and manufacturing process technology, applied in the field of solar cells, can solve the problems of lack of light concentrating performance and large loss of light reflection, and achieve the effects of prolonging the effective power generation time, low production cost, and increasing the light-receiving area

Active Publication Date: 2014-04-16
江苏福克斯电气集团有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional solar cells use planar silicon substrates. When the light is not directly irradiated, the light reflection loss of the cell is large, and it does not have light-gathering performance.

Method used

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  • Concentric-circle-type corrugated solar cell silicon substrate and manufacturing process thereof
  • Concentric-circle-type corrugated solar cell silicon substrate and manufacturing process thereof
  • Concentric-circle-type corrugated solar cell silicon substrate and manufacturing process thereof

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Embodiment

[0029] Such as figure 1 , 2 . As shown in 3, a concentric circular corrugated solar cell silicon substrate includes a silicon substrate body 1, and the surface of the silicon substrate body 1 is a concentric circular corrugated non-planar structure arranged sequentially in strips. The height difference between the top 2 and the bottom 3 of the concentric circles of the silicon substrate body 1 is in the range of 2-3 mm. The width difference between the diameters of the bottom surfaces of the concentric circles of the silicon substrate body 1 is in the range of 7-12 mm.

[0030] Such as Figure 4 Shown, a kind of manufacturing process of concentric circular corrugated solar cell silicon substrate comprises the following steps:

[0031] Step 1, oxidation masking layer deposition: Utilize the silk screen 4 that has the concentric circular window arranged in strip order to deposit the silicon dioxide oxide layer on the silicon substrate, form the two layers with concentric circ...

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Abstract

The invention discloses a concentric-circle-type corrugated solar cell silicon substrate and a manufacturing process thereof. The solar cell silicon substrate comprises a silicon substrate body. A concentric-circle-type corrugated non-planar structure is arranged on the surface of the silicon substrate body and arranged in strip sequence. The manufacturing process includes utilizing a magnetron sputtering method to pre-deposit a concentric-circle-type silicon nitride film, utilizing a plasma reinforced chemical gas deposition method to deposit an amorphous silicon masking layer and utilizing chemical corrosion to form surface appearance. The surface of the silicon substrate is of a concentric-circle-type corrugated non-planar structure. By means of the structure, the substrate light receiving area is effectively increased, perpendicular incidence faces exist all the time when the light is emitted from different angles, and the light energy is utilized to the maximum limit. The silicon substrate is high in power generation efficiency.

Description

technical field [0001] The invention belongs to the field of solar cells, and in particular relates to a solar cell silicon substrate whose surface is arranged sequentially in strips with concentric circular non-planar structures and a manufacturing process thereof. Background technique [0002] Solar power generation is clean and does not produce pollution, so solar power generation is known as the most ideal energy source. Obtaining electricity from solar energy requires photoelectric conversion through solar cells. [0003] At present, solar cells mainly include monocrystalline silicon cells, polycrystalline silicon cells and thin-film cells, among which monocrystalline silicon cells have the highest conversion efficiency in mass production, which can reach 18-19%. However, the conversion efficiency of the solar cell cannot meet people's demand for the conversion efficiency of the solar cell. Therefore, people have carried out corresponding structural design on the batt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0352H01L31/0236H01L31/18
CPCY02E10/50H01L31/02363Y02P70/50
Inventor 王强花国然仲蓓鑫程实曾凤钱爱平
Owner 江苏福克斯电气集团有限公司
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