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Preparation method for high-compactness niobium oxide rotary target material

A niobium oxide, rotating target technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problem of low density of rotating target material, achieve high yield, reduce process cost and shorten cycle Effect

Inactive Publication Date: 2014-03-26
河北东同光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention provides a method for preparing a high-density niobium oxide rotary target in order to solve the technical problem of low density of the rotary target produced by the spraying process

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] A method for preparing a high-density niobium oxide rotating target in this embodiment is carried out according to the following steps:

[0028] After mixing 2000g of high-purity niobium oxide powder and 50g of tantalum powder in a mixer for 1 hour, put them into an atmospheric calciner for calcination at 450°C for 2 hours. Put the mixed powder into the mold, first put it into the vacuum sintering furnace, under the vacuum condition, uniformly heat up to 1000°C within 2 hours, keep the temperature at 15MPa for 1 hour; The mold process is used to demould the rotating target in a high-temperature furnace; then lower it to room temperature and release it from the furnace. The crude rotating target after being released from the furnace is machined and cleaned with an electric spark cutting machine and a circular grinder. The measured target density is 4.59g / cm 3 , the resistivity is 8.5×10 -3 Ω·cm.

Embodiment 2

[0030] A method for preparing a high-density niobium oxide rotating target in this embodiment is carried out according to the following steps:

[0031] After mixing 6000g of high-purity niobium oxide powder and 230g of tantalum powder in a mixer for 2 hours, put them into an atmospheric calciner for calcination at 480°C for 2 hours. Put the mixed powder into the mold, first put it into the vacuum sintering furnace, under the vacuum condition, uniformly heat up to 1200°C within 3 hours, keep the temperature at 25MPa for 5 hours; then, when the temperature is lowered to 700°C, use high temperature The mold process is used to demould the rotating target in a high-temperature furnace; then lower it to room temperature and release it from the furnace. The crude rotating target after being released from the furnace is machined and cleaned with an electric spark cutting machine and a circular grinder. The measured target density is 4.60g / cm 3 , the resistivity is 3.2×10 -3 Ω·cm. ...

Embodiment 3

[0033] A method for preparing a high-density niobium oxide rotating target in this embodiment is carried out according to the following steps:

[0034] After mixing 6000g of high-purity niobium oxide powder and 260g of tantalum powder in a mixer for 2 hours, put them into an atmospheric calciner at 480°C for 3 hours for calcination. Put the mixed powder into the mold, first put it into the vacuum sintering furnace, under the vacuum condition, uniformly heat up to 1280°C within 3 hours, heat preservation and pressure at 18MPa for 4 hours; then, use high temperature when cooling down to 1100°C Demoulding process The rotating target is demoulded in a high-temperature furnace; then it is lowered to room temperature and released from the furnace. The crude rotating target after being released from the furnace is machined and cleaned with an electric spark cutting machine and a circular grinder. The measured target density is 4.59g / cm 3 , the resistivity is 7.8×10 -3 Ω·cm.

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Abstract

The invention relates to a preparation method for a high-compactness niobium oxide rotary target material, relates to a preparation method for a ceramic molding product by using niobium oxide as base material, and aims to solve the technical problem that the rotary target material produced through the conventional spraying technology is low in density. The preparation method comprises the following steps: I, pre-treating niobium oxide powder; II, using a hot-pressing sintering process and a high-temperature demoulding process to prepare the crude product of a rotary target; III, performing finish machining on the crude product of the rotary target. The preparation method has the advantages that the cost is low, the cycle is short, energy consumption is low, and the production efficiency is high. The rotary target material prepared through the preparation method is no less than 4.59 / cm<3> in density, less than 9*10-3 omega.cm in electrical resistivity, good in conductivity, and high in yield. The prepared rotary target material is applied to the fields of solar cells, liquid crystal displays, ion displays, mobile phone touch screens, optical glass and gas sensors.

Description

technical field [0001] The invention relates to a method for preparing ceramic molded products with niobium oxide as the base material. Background technique [0002] Niobium oxide target is an important material for the preparation of AR glass (anti-reflection glass) and ITO glass. AR glass uses the most advanced magnetron sputtering coating technology in the world to coat a layer of niobium oxide anti-reflection film on the surface of ordinary tempered glass, which can effectively reduce the reflection of the glass itself, increase the transmittance of the glass, and make the Colors that were originally seen through the glass are more vibrant and true to life. Shadow-eliminating ITO glass is coated with a layer of AR film between the ITO film and the glass. While satisfying the conductivity of ITO, it also has the following advantages: 1. The glass transmittance is high. Under the premise of the same backlight, it can pass through Reduce the impact of ambient light to obt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/34
Inventor 康明生崔娜朱辉齐梦强吴洁闫丽娜
Owner 河北东同光电科技有限公司
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