A kind of mems humidity sensor and preparation method

Abstract

An MEMS humidity sensor and a preparation method therefor. The MEMS humidity sensor comprises a support substrate (1), an electrical isolation layer (102) arranged on the support substrate (1) and a comb component (2, 3, 4, 5) arranged on the electrical isolation layer (102). A heating resistor stripe (8) is arranged among the comb component (2, 3, 4, 5), and a nanofibre (6) is covered on the heating resistor stripe (8). The MEMS humidity sensor has a simple structure, a high sensitivity and a strong processing compatibility, which is convenient for integration and fabrication.

Description

technical field [0001] The invention relates to a MEMS humidity sensor and a preparation method thereof. Background technique [0002] Humidity is a parameter that characterizes the content of water vapor in the atmosphere, generally expressed as relative humidity (%RH), and its value represents the ratio of the pressure of water vapor in the air to the saturated water vapor pressure at the same temperature. Air humidity is directly related to people's daily work, life and production, so the monitoring and control of humidity is becoming more and more important. However, the measurement of humidity will be affected by other factors (atmospheric pressure, temperature), and its calibration is also a difficult problem. Therefore, it can be said that among conventional environmental parameters, humidity is one of the most difficult parameters to measure accurately. The well-known hair hygrometer, psychrometer, etc. can no longer meet the actual needs at this stage. Therefore, ...

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Problems solved by technology

However, the electrolyte humidity sensor has a narrow measurement range, poor repeatability, and its service life is short; the polymer compound humidity sensor has the advantages of good humidity sensing performance and high sensitivity, but its performance is reduced and stable under high temperature and high humidity conditions. Poor performance, corrosion resistance and anti-contamination ability are also weakened; semiconductor ceramic material humidity sensor has the advantages of good humidity sensing performance, simple production, low cost, short response time, heating and cleaning, etc., but the accuracy of this type of sensor is relatively low. The performance is also poor at low and high temperatures, and it is difficult to achieve integration; compared with the above-mentioned moisture-sensitive materials, porous metal oxide humidity sensors have fast response speed, good chemical stability, strong ability to withstand high and low temperatures, and can Integration and other advantages, but its implementation process is difficult to be well compatible with conventional microelectronics processes

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