Single wafer cleaning method
A wafer and single-chip technology, which is applied in the field of single-chip cleaning of wafers, can solve problems affecting the effect of single-chip cleaning of wafers, and achieve the effects of increasing cleaning effects, reducing fluorine residues, and easy removal
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[0026] In the following description, numerous specific details are given in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without one or more of these details. In other examples, some technical features known in the art are not described in order to avoid confusion with the present invention.
[0027] In order to provide a thorough understanding of the present invention, the detailed structure will be set forth in the following description. It is evident that the practice of the invention is not limited to specific details familiar to those skilled in the art. Preferred embodiments of the present invention are described in detail below, however, the present invention may have other embodiments besides these detailed descriptions.
[0028] Such as figure 1 As shown, the single-wafer cleaning method of the wafer according to the first embodiment of pe...
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