Method for preparing nitrogen0gradient hard reaction membrane of titanium aluminum niobium nitride (TiAlNbN)

Abstract

The invention relates to a method for preparing a nitrogen-gradient hard reaction membrane of titanium aluminum niobium nitride (TiAlNbN). The method sequentially comprises steps of 1. confirmation of a deposition technique and ingredients of target materials; 2. selection and pretreatment of workpieces; 3. confirmation of a preliminary bombardment process; 4. confirmation of a deposition process; 5. vacuum heating treatment; 6. workpiece revolution. According to the method, the cost for coating is lowered, high adhesive force, high hardness and high thermal shock property of the membrane are guaranteed, furthermore, the inner stress of the membrane is reduced, and the reaction membrane has good stability and repeatability.

Description

technical field [0001] The invention relates to a method for preparing a nitrogen gradient hard reaction film, in particular to a method for preparing a multi-arc ion nitrogen-plated gradient hard reaction film by using a combined target, such as a titanium nitride aluminum niobium nitrogen gradient hard reaction film (hereinafter referred to as " TiAlNbN" instead of "titanium aluminum niobium nitride") preparation method. Background technique [0002] Multi-arc ion plating is a vacuum physical deposition technology with multiple cathode arc evaporation sources that can be evaporated simultaneously. It has the remarkable characteristics of fast deposition speed, dense film structure, strong adhesion, and good uniformity. This technology is suitable for the preparation of hard films and hard reactive gradient films, and has been successfully applied in the preparation of titanium nitride, titanium aluminum nitride and more hard reactive films. Titanium aluminum nitride, tita...

AI Technical Summary

Problems solved by technology

[0003] For the single-layer titanium-based multi-component hard reaction film, there are mainly the following disadvantages: 1. Generally, the film hardness and the film layer are easy to appear. The contradiction between adhesion, that is, hardness and adhesion are difficult to meet at the same time; 2. Multi-element alloy targets are not easy to purchase in the market, and often require special melting and processing, which not only costs high, but also takes a long time; A large internal stress is generated in the layer, which affects the thermal shock performance of the hard film, thereby affecting the use effect and service life