Semiconductor volatile organic compound sensor based on solution color-changing pigment

Abstract

The invention relates to a semiconductor volatile organic compound sensor based on a solution color-changing pigment. The semiconductor volatile organic compound sensor is designed and manufactured by adopting a standard silicon process and uses a gated horizontal bipolar junction transistor as a core part, wherein the solution color-changing pigment is used as a gas reaction film of the semiconductor volatile organic compound sensor. Meanwhile, when the semiconductor volatile organic compound sensor works under a hybrid working mode of a metal-oxide-semiconductor type field effect transistor and a bipolar junction transistor, the semiconductor volatile organic compound sensor has relatively high conduction efficiency, and further the sensing sensitivity is improved. The semiconductor volatile organic compound sensor realizes the measurement of a semiconductor volatile organic compound at a normal temperature on the premise of having the advantages of semiconductor devices, such as small volume, light weight, easiness of volume production, low cost, low power consumption and easiness of integration. According to semiconductor volatile organic compound sensor, the service life is theoretically prolonged, and the energy consumption required by a common semiconductor gas sensor when operating at a high temperature is reduced. The semiconductor volatile organic compound sensor can be applied to the fields of small environmental detection devices and the like.

Description

technical field [0001] The invention relates to the technical field of semiconductor sensors, in particular to a semiconductor volatile organic compound sensor based on solution color-changing pigments, which can pass environmental detection. Background technique [0002] Volatile organic compounds are common harmful substances that can cause cancer, neurological diseases, and direct fatality. There are many definitions in the world, mainly referring to organic compounds that are volatile at room temperature, such as formaldehyde, methanol, acetone, benzene, etc., which are mostly released in factories, paints, and garbage dumps. With the progress of society, the measurement and monitoring technology of volatile organic compounds is becoming more and more urgent. [0003] At present, there are mainly two types of measurement of volatile organic compounds: optical measurement based on the color change caused by the reaction of volatile organic compounds and substances, and m...

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Problems solved by technology

[0005] On the other hand, the traditional semiconductor sensor is based on the metal oxide semiconductor field effect transistor structure, which has the characteristic that it cannot be turned on at room temperature

It is also possible to increase high doping in the well region 8 as needed to turn on the device, but after this method, the output value of the device will not change with the potential change of the gate (gate) electrode 6, so it cannot be applied to the sensor

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