Double mercury lamp splicing exposure system for lithography equipment
An exposure system and lithography equipment technology, which is applied in the field of double mercury lamp splicing exposure system, can solve the problems of difficult control and low lighting precision, and achieve the effect of improving illuminance
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[0019] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0020] The present invention expects to provide an optical system for splicing double mercury lamps, which can accurately monitor and control the energy of the double light sources while increasing the illuminance on the substrate, and can realize switching between the working modes of the double lamps and single lamp.
[0021] figure 1 It is a schematic diagram of the overall structure of the double mercury lamp splicing exposure system involved in the present invention. Such as figure 1 As shown in , the double mercury lamp splicing exposure system is mainly composed of the following modules: light source 1, rectangular prism 2, small quartz rod 3, coupling lens group 4, large quartz rod 5, and relay lens group 6. Here, the small quartz rod 3 and the large quartz rod 5 are defined according to the relative size of their volumes. Such as ...
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