PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment

A technology for solar cells and manufacturing equipment, applied in final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve the problems of complex equipment, high weight per unit area, high equipment cost, etc., and achieve the effect of high production capacity

Active Publication Date: 2013-11-20
SHANGHAI ZONGHE TRADE CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Taking the stainless steel substrate as an example, the typical thickness is 0.125 mm, and the equipment is very complicated and huge, so the equipment cost is high, the product is not flexible, and it is semi-flexible. The typical bending radius is about 200 mm, and the weight per unit area of ​​the product is relatively high. high

Method used

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  • PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment
  • PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment
  • PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment

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Embodiment Construction

[0026] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described The embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0027] The PECVD flexible solar cell manufacturing equipment in the present invention includes at least one vacuum chamber, and at least one electrode chamber is arranged in each vacuum chamber, and multiple sets of electrode chambers are installed in the same vacuum chamber in the multi-chamber multi-volume PECVD flexible solar cell man...

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Abstract

The invention discloses PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment. The equipment comprises at least one vacuum chamber, wherein at least one electrode chamber is arranged in each vacuum chamber and sequentially comprises an inner tube, a middle tube and an outer tube from inside to outside; the two ends of the inner tube, the middle tube and the outer tube are fixed through end closures; the distance between the inner tube and the middle tube is equal everywhere; and the inner tube and the middle tube respectively serve as an inner electrode and an outer electrode and are connected with a radio frequency generator. The PECVD flexible solar battery manufacturing equipment has the advantages that the inner tube and the middle tube are made into plasma discharge electrodes, the accuracy of space between the electrodes is automatically ensured, and the film formation quality in a PECVD technological process is ensured.

Description

technical field [0001] The invention relates to the technical field of solar cell coating equipment, in particular to PECVD flexible solar cell manufacturing equipment. Background technique [0002] At present, solar cell modules widely manufactured in the world are based on silicon wafers or glass, and are rigid structures that cannot be bent. They are heavy, bulky, and impact-resistant, so they are not suitable for mobile applications. At present, only a few companies in the world have mastered the manufacture of solar cell modules with stainless steel foil (Stainless Steel) or polyimide (Kepton) and other polymer films as substrates. The products are flexible or semi-flexible, bendable, light in weight, and bulky. Small, excellent performance such as impact resistance, suitable for mobile applications. [0003] In the prior art, the "roll-to-roll" sample delivery technology is used for semiconductor vacuum coating, which needs to go through different vacuum chambers for ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/505C23C16/458H01J37/32H01L31/18
CPCY02P70/50
Inventor 奚建平
Owner SHANGHAI ZONGHE TRADE CO LTD
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