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Single convex beam type micromechanical acceleration sensor

An acceleration sensor and micro-mechanical technology, applied in the direction of acceleration measurement using inertial force, can solve the problems of low sensitivity, mutual restriction between frequency and sensitivity, high sensitivity, etc., and achieve the effects of good repeatability, high yield, and convenient operation

Inactive Publication Date: 2013-09-18
INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Cantilever beam micro accelerometers have the problem of mutual restriction between frequency and sensitivity, that is, high frequency means low sensitivity, and low frequency means high sensitivity

Method used

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  • Single convex beam type micromechanical acceleration sensor

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Effect test

Embodiment 1

[0022] figure 1 It is a structural schematic diagram of the single convex beam micromachined acceleration sensor of the present invention. exist figure 1 Among them, the single convex beam type micromachined acceleration sensor of the present invention includes a sensitive chip and a lower glass plate 5; wherein, the sensitive chip contains a frame 1, a sensitive convex beam 2, a quality block 3, and a piezoresistor, and its connection relationship is, The frame 1 is provided with a sensitive convex beam 2, one end of the sensitive convex beam 2 is connected with the frame 1, and the other end is connected with the mass block 3, and the sensitive convex beam 2 and the mass block 3 together constitute the movable part of the sensitive chip; the piezoresistor is set On the upper surface of the sensitive convex beam 2: the sensitive chip is connected to the lower glass plate 5 by bonding.

[0023] The sensitive convex beam 2 in the sensitive chip is composed of an upper rectang...

Embodiment 2

[0029] The structure of this embodiment is the same as that of Embodiment 1, except that the width of the upper rectangular beam of the sensitive convex beam is 150 μm, the thickness is 100 μm, and the length is 900 μm; the width of the lower rectangular beam of the sensitive convex beam is 900 μm, and the thickness is 900 μm. The mass is 200 μm and the length is 900 μm; the thickness of the mass block is 300 μm, the length is 900 μm, and the width is the same as that of the sensitive convex beam, both are 900 μm. The natural frequency of the sensor of the present invention is 85 kHz, and the sensitivity is about 0.2 μV / g / V. The gap between the movable part of the sensitive chip and the glass plate is 10 μm.

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Abstract

The invention provides a single convex beam type micromechanical acceleration sensor which comprises a sensitive chip and a lower glass plate. The sensitive chip comprises a framework, a sensitive convex beam, a mass block and a piezoresistor. The sensitive convex beam is arranged in the framework, one end of the sensitive convex beam is connected with the framework, the other end of the sensitive convex beam is connected with the mass block, and the sensitive convex beam and the mass block together form a movable portion of the sensitive chip. The piezoresistor is arranged on the upper surface of the sensitive convex beam, and the sensitive chip is in bonding connection with the lower glass plate. The sensitive convex beam disposed in the sensitive chip is formed by an upper rectangular beam and a lower rectangular beam with the same length in a composite mode, and the rectangular beams have narrow tops and wide bottoms. A gap is reserved between the movable portion of the sensitive chip and the lower glass plate. The single convex beam type micromechanical acceleration sensor has higher sensitivity than a normal cantilever beam on the condition of the same inherent frequency and has higher inherent frequency than the normal cantilever beam on the condition of the same sensitivity.

Description

technical field [0001] The invention belongs to the technical field of micro-acceleration sensors, and in particular relates to a single convex beam type micro-mechanical acceleration sensor. Background technique [0002] The basic working principle of the micromechanical piezoresistive acceleration sensor is based on the piezoresistive effect of the semiconductor. The beam island structure is commonly used. The mass is supported by the cantilever beam or the connecting beam, and the piezoresistor is fabricated on the beam by ion implantation or diffusion process. When the sensor feels the force, the mass shifts, causing the cantilever beam or connecting beam to twist or bend, and the stress changes in the resistance, which causes the resistance value of the piezoresistor to change. Use appropriate peripheral circuits to convert this change into measurable signals such as voltage, current and other forms of output. After calibration, the relationship between the output sign...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/12
Inventor 孙远程袁明权张茜梅王海青武蕊屈明山
Owner INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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