Micro spectrometer based on micro-electro-mechanical interference platform
A micro-spectrometer and micro-electromechanical technology, applied in the field of micro-spectrometers, can solve problems such as undesigned, inconvenient to carry, and inconvenient to use, and achieve the effects of easy repeatability, correction of uneven movement speed, and easy portability
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[0030] The technical solutions of the present invention will be further described below through specific embodiments.
[0031] The micro-spectrometer based on the micro-electromechanical interference platform includes an optical system, a circuit system and a mechanical base.
[0032] figure 1 A system block diagram of the optical path system provided by the present invention. like figure 1 As shown, the optical path system includes a light source 1, a collimator lens 2, a sample cell 3, a collimator lens 4, a dichroic mirror 5, a beam splitter 8, a total reflection mirror 7, a micro-electromechanical interference platform 33, a dichroic mirror 17, Filter 16 and its detector 14 and detector 15 .
[0033] Specifically, such as figure 1 As shown, the collimating lens 2 is located between the light source 1 and the sample cell 3 and is used to collimate the light of the light source 1 . The collimator lens 4 is located behind the sample cell 3 and is used to collect the samp...
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