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Vapor plating metal mask plate prepared from nickel-iron alloy

A metal mask, nickel-iron alloy technology, applied in vacuum evaporation plating, metal material coating process, sputtering plating, etc., can solve the problems of high technical requirements, high price, high energy consumption, etc., to meet the requirements of evaporation , low cost, good board quality

Inactive Publication Date: 2013-07-17
KUN SHAN POWER STENCIL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But at the same time, Invar alloys are all obtained by smelting, which requires high energy consumption and high technical requirements, so the price is quite high, and the price of a single piece is as high as 1,000 yuan or more.

Method used

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  • Vapor plating metal mask plate prepared from nickel-iron alloy

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Embodiment Construction

[0022] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0023] The invention discloses a metal mask for vapor deposition prepared from a nickel-iron alloy, the metal mask is a mask of a nickel-iron alloy material produced by an electroforming process; the nickel-iron alloy material is composed of two elements, nickel and iron, The iron element content is 40% to 55%, and the nickel element content is 45% to 60%.

[0024] During processing, the thickness of the metal mask is in the range of 30-100 μm; in addition, the metal mask has an opening pattern area. The nickel-iron alloy mask plate inc...

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Abstract

The invention discloses a vapor plating metal mask plate prepared from a nickel-iron alloy. The metal mask plate is a nickel-iron alloy mask plate prepared by an electroforming process. The nickel-iron alloy material include two elements: nickel and iron, wherein the iron content is 40%-70%, and the nickel content is 30%-60%. With similar physical properties to invar alloy plates, the vapor plating mask plate provided in the invention has high surface brightness, high uniformity, and good surface quality, and has lower cost than the mask plate made from an invar alloy, so that the cost is saved. Meanwhile, the mask plate provided in the invention has a small linear thermal expansion coefficient, thus meeting the vapor plating requirement. In addition, the mask plate involved in the invention has the characteristics of high hardness and high magnetism.

Description

technical field [0001] The invention belongs to the technical field of semiconductor elements, and relates to a metal mask, in particular to a metal mask for evaporation made of nickel-iron alloy. [0002] Background technique [0003] The discovery of Invar alloy has attracted the attention and research of scientists from all over the world, which has greatly improved the type, performance and application of Invar alloy. For example, in 1927, Japan first developed Fe-Ni-Co and Fe-Ni-Cr Invar alloys in 1927, and in 1937, Germany A..Kussmann developed Fe-Pt and Fe-Pd Invar alloys; In the 1960s, 4J32 and 4J36 Invar alloys were also developed; after 70 years of development, it was not until the 1970s that Inco Corporation of the United States developed the Incoloy903 alloy that the low-expansion alloy entered the field of high-temperature applications. By the end of the 1980s, The modern low-expansion superalloy series was formed. As a low-expansion alloy, structural stabili...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24C25D1/10C25D3/56
Inventor 魏志凌高小平
Owner KUN SHAN POWER STENCIL
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