Edge-emitting crystal laser with circular spot output and low divergence angle and composite waveguide device
A photonic crystal waveguide and composite waveguide technology, applied in the field of optical communication, can solve problems such as multi-mode lasing, affecting beam quality, etc., and achieve the effects of low circular spot output, increased stability, and high repeatability
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[0035] In a preferred example of the present invention, the loss modulation layer 6 and the mode expansion layer 7 in the vertically asymmetric photonic crystal waveguide structure are all n-type Al 0.1 GaAs / Al 0.2 GaAs, the thicknesses are 0.1 μm / 0.9 μm, the doping concentrations of layer 6 and layer 7 are different, and layer 6 is heavily doped. The substrate is N-type GaAs, and the active region is 3 pairs of continuously grown InGaAs / GaAsP quantum wells, and the refractive index of the GaAsP layer is lower than that of Al 0.2 The refractive index of GaAs has a gain peak near 1065nm in the infrared band. The upper confinement layer is p-type Al 0.3 GaAs, the thickness is 1μm, and the capping layer is P-type GaAs. The width of the ridge waveguide is 4 μm, and the etching depth reaches the first pair of quantum wells. The distance between the mesa and the ridge waveguide on both sides of the mode expansion region can be adjusted according to the distribution of the optica...
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