Zinc diffusion device and diffusion method thereof in manufacturing of photoelectric detector
A photodetector and diffusion device technology, which is applied in semiconductor/solid-state device manufacturing, circuits, electrical components, etc., can solve problems such as large temperature fluctuation range, complicated operation, and dangerous use, and achieve precise control of diffusion depth and diffusion temperature fluctuations. Small, easy-to-operate effect
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[0024] In order to facilitate a further understanding of the structure and method of the invention and the effects achieved, the preferred embodiments are described in detail below in conjunction with the accompanying drawings.
[0025] In order to obtain good photoelectric characteristics in the InGaAs detector process, a good PN junction must be obtained through diffusion, and the purpose of the present invention is to perform zinc diffusion in intrinsic indium phosphide.
[0026] As shown in Figure 1, the diffusion device of zinc in the production of photodetector of the present invention comprises a heating furnace 6, a quartz tube 5 closed at both ends, a gas control system 1, a vacuum system 18, a quartz boat 9, and is used to push the quartz boat 9 into The vacuum propulsion device 11 of the quartz tube 5 and the boat board 10 connected with the vacuum propulsion device 11 are provided with a furnace door 12 near the end of the vacuum propulsion device 11 on the boat boa...
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