Production equipment for preparing semiconductor film on tubular base

Abstract

The invention discloses production equipment for preparing a semiconductor film on a tubular base. The production equipment adopts a single-slot multi-tube manner, heated liquid flows into the inner wall of the tubular base so as to heat the tubular base from inner side to heat a reaction solution through the tubular base, the reaction solution can exist in a normal temperature status and does not affect the growth of the semiconductor film, and the reaction can be carried out preferably on the outer wall of the tubular base so as to save the solution; high temperature heating liquid provided by an independent constant high-temperature heating box is taken as a heat source, so that the temperature of semiconductor film deposition is stable, and high repeatability of the semiconductor film deposition is realized; a manner of combination of an overflow structure and interior heating of the tubular base is also adopted; and the solution is updated at real time by adopting a reaction solution overflow circulatory system, the effect of concentration reduction on a reaction process at a later period is reduced, the waste liquor emission load is lowered, and the solution injection volume is reduced. The production equipment is applicable to industrial mass production of semiconductor films deposited on various tubular bases.

Description

technical field [0001] The invention relates to the field of solar cell preparation, in particular to a production equipment for preparing a semiconductor thin film on a tubular substrate. Background technique [0002] The development of thin-film solar cells has become the main development direction of future batteries due to its low loss and high yield characteristics. Traditional solar cells are prepared on flat substrates. This kind of flat solar cells is not only bulky and inconvenient to transport, but also requires a large investment in equipment and high investment risks due to harsh preparation conditions. For this reason, a tubular solar cell has been developed, which not only solves the above-mentioned problems of the flat substrate solar cell, but also, this tubular structure enables the cell to maintain uniform heat absorption even if the sun’s irradiation angle changes during the day, ensuring power generation. Stablize. Tubular solar cells improve the cost p...

AI Technical Summary

Problems solved by technology

The disadvantage of this method is that the solution is heated first, and the nucleation inside the solution is synchronized with the nucleation of the substrate. After the nucleation inside the solution, it will trigger avalanche growth in the solution, so there are many particles in the solution, and the quality of the deposited film cannot be guaranteed.

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