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Optical element laser pretreatment method and device based on total reflection principle

A technology of laser pretreatment and optical components, which is applied in electrical components, laser welding equipment, semiconductor/solid-state device manufacturing, etc.

Active Publication Date: 2015-09-23
HEFEI ZHICHANG PHOTOELECTRIC TECH
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  • Abstract
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Problems solved by technology

[0007] The technical problem to be solved by the present invention is to provide a method and device for laser pretreatment of optical elements based on the principle of total reflection, to solve the problem of the existing laser pretreatment technology in the process of increasing the laser damage threshold of large-diameter optical elements due to too long time-consuming The problem that cannot meet the requirements of actual use, the present invention uses the laser beam to perform multiple total reflections inside the transparent optical element sample to recover the laser energy and reuse it, and at the same time treat the front subsurface, rear subsurface, front and rear surfaces, and the body of the transparent optical element Features are processed in parallel, which can greatly increase the speed of laser preprocessing

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  • Optical element laser pretreatment method and device based on total reflection principle
  • Optical element laser pretreatment method and device based on total reflection principle
  • Optical element laser pretreatment method and device based on total reflection principle

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Embodiment Construction

[0025] See Figure 6 , the optical element laser preprocessing device based on the principle of total reflection, including a laser light source 1 arranged on one side of the transparent optical element 11, and the laser energy between the rear end of the laser light source 1 and one side of the transparent optical element 11 in turn Adjustment control device 2, laser beam shaping processing device 3 and laser beam splitting wedge 4, the CCD imaging device 5 behind the first reflection output end of laser beam splitting wedge 4 is arranged on the first laser beam splitting wedge 4 The spectroscopic device 6 behind the reflection output end, the laser high reflection mirror 9 behind the transmission output end of the laser beam splitting wedge 4, the laser high reflection mirror clamping adjustment device 10 for fixing the laser high reflection mirror 9, respectively The photodetector 8 and the laser energy measuring device 7 are arranged behind the two splitting output ends of...

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Abstract

The invention discloses a method and a device for optical element laser preprocessing based on a total reflection principle. The method comprises that a laser beam enters the inside of a transparent optical element from a side of the transparent optical element and irradiates a processing point 1 of the front surface of the transparent optical element, the incident angle of the laser beam meets the optical total reflection condition at the processing angle 1, the laser beam is reflected to the processing point 2 of the rear surface of the element via the total reflection, the laser beam is reflected to the processing point 1 and the processing point 2 back and forth, and the laser beam is subjected to total reflection between the front surface of the inside of the element and the rear surface of the inside of the element till the laser beam exits from the other side of the transparent optical element. The laser beam is subjected to total reflection in the transparent optical element sample, the laser energy is recovered and reused, the front subsurface, the rear subsurface, the front surface, the rear surface and characteristics of the optical element are processed, and the speed of the laser preprocessing is improved.

Description

technical field [0001] The invention relates to the field of laser pretreatment of optical materials, in particular to a laser pretreatment method and device for optical elements based on the principle of total reflection. Background technique [0002] In recent years, with the rapid development of laser technology and its applications, especially the substantial increase in laser output energy and power levels, the requirements for optical properties of various optical components, such as absorption characteristics, defect distribution, and laser damage resistance, have also increased. Higher and higher. The requirements of some large-scale laser systems for their optical components are getting closer and closer to the limit of existing processing technology. Therefore, it is not only technically becoming more and more difficult to improve the optical performance of optical components only from traditional component processing methods and processing techniques. The more di...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/302B23K26/064B23K26/50
CPCY02P70/10Y02P70/50
Inventor 吴周令陈坚吴令奇
Owner HEFEI ZHICHANG PHOTOELECTRIC TECH
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