Solvent spraying apparatus used in glass rotary coating

Abstract

The invention discloses a solvent spraying apparatus used in glass rotary coating. The apparatus comprises a solvent bottle containing a solvent, and a nozzle connected with the solvent bottle through a pipe. A pneumatic valve is arranged on the pipe. A solenoid valve used for controlling the on and off of the pneumatic valve is arranged on the pneumatic valve. A fluid flow meter is arranged in series on the pipe. With the solvent spraying apparatus provided by the invention, solvent flow conditions can be accurately detected, such that spraying dose accuracy is ensured, and product large-batch rejection is effectively avoided. Therefore, production can be performed stably, continuously, and safely.

Description

Technical field [0001] The invention relates to semiconductor technology, in particular to a solvent spraying device for spin coating glass. Background technique [0002] Spin on glass coating (SOG), also known as spin-on silicon oxide, is the main localized planarization technology in the semiconductor manufacturing process. It is used to planarize the metal layers to increase the gap between the layers. Combining characteristics to avoid the formation of voids and film peeling. Specifically, SOG is to apply a liquid solvent containing a dielectric material uniformly on the surface of the wafer by spin coating to fill the recessed holes in the deposited dielectric layer, and then undergo heat treatment to remove the solvent, thereby A dielectric material similar to silicon dioxide remains on the surface of the wafer after curing. The simple process of SOG is as follows: rotating flat coating→heating and grilling→high temperature hardening. [0003] Such as figure 1 As shown, it...

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Problems solved by technology

[0004] In the above-mentioned existing solvent spraying device, there are mainly the following defects and hazards: (1) the device does not have any mechanism for detecting whether the flow in the solvent spraying circuit is abnormal, and the capacitive liquid level switch 17 in the device is only used to detect Whether the solvent is used up; (2) During the preparation and production, it is easy to happen that the pneumatic valve cannot be opened or closed due to aging, or problems such as solvent crystallization occur, resulting in the failure of the above-mentioned device to spray or the spraying dosage is inaccurate

Due to the above-mentioned defects and hazards in the prior art, a large number of products are often scrapped and cannot be discovered in time, thereby causing huge losses to production

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