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Constant-frequency drive method and constant-frequency drive device of tunable micromechanical gyroscope

A technology of a micromachined gyroscope and a driving method, which is applied in the direction of steering induction equipment, etc., can solve the problems of complex control circuits, large delays, and the inability of signal detection circuits to achieve the effect of simplifying signal processing and improving stability.

Active Publication Date: 2013-02-27
ZHEJIANG UNIV
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Problems solved by technology

Among the existing micromechanical gyroscope driving technologies, there is no shortage of technologies that can keep the driving frequency constant, but these technologies either require that the signal detection circuit does not have a large delay, or require a relatively complex control circuit

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  • Constant-frequency drive method and constant-frequency drive device of tunable micromechanical gyroscope
  • Constant-frequency drive method and constant-frequency drive device of tunable micromechanical gyroscope
  • Constant-frequency drive method and constant-frequency drive device of tunable micromechanical gyroscope

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Embodiment Construction

[0029] The constant frequency driving method of the tunable micromechanical gyroscope is that the constant frequency driving signal has a constant frequency relative to the reference frequency source, and the phase difference signal between the constant frequency driving signal and the driving mode output signal is obtained through phase difference detection, and the phase difference signal is used to The feedback control obtains the tuning signal, applies the tuning signal to the tuning structure of the tunable micro-mechanical gyro, adjusts the resonant frequency of the driving mode of the tunable micro-mechanical gyroscope, and locks the resonant frequency of the driving mode to the frequency of the constant-frequency driving signal .

[0030] Such as figure 1 As shown, the specific steps of the constant frequency driving method of the tunable micromachined gyroscope are as follows:

[0031] 1) The AC drive signal generation module generates the AC drive signal according t...

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Abstract

The invention discloses a constant-frequency drive method and a constant-frequency drive device of a tunable micromechanical gyroscope. The method comprises the steps of generation of a drive signal, generation of a tuning signal, signal detection, amplitude extraction and phase extraction, and the device comprises the tunable micromechanical gyroscope, a drive signal generation circuit, a capacitance / voltage conversion circuit, a tuning signal amplification circuit, a first digital / analog converter, an analog / digital converter, a second digital / analog converter and an in-situ programmable gate array chip. Through the automatic adjustment of the alternative-current drive signal amplitude and the resonant frequency of the tunable micromechanical gyroscope, the frequency and the amplitude of the drive output signal can be maintained constant, and the phase difference of the drive output signal and the alternative-current drive signal can also be maintained constant. The constant-frequency drive method and the constant-frequency drive device are simple to realize, the resonant frequency of a drive modal is unnecessary to track, the influence on the system from the module which is correlated to the frequency in the system under the time-variant frequency can be avoided, the signal processing process of the system can be simplified, and the system stability can be improved.

Description

technical field [0001] The invention relates to a micro-mechanical gyroscope, in particular to a constant-frequency driving method and device for an adjustable micro-mechanical gyroscope. Background technique [0002] The micromechanical gyroscope is an inertial sensor that perceives external rotation information. Due to its advantages of small size, low power consumption, and batch production, it has gradually gained attention in civilian and even military fields. The stable operation of the micro-mechanical gyroscope depends on the continuous and stable vibration of its driving mode, and the drift of the parameters of the micro-mechanical gyroscope itself puts forward certain requirements on the vibration control circuit of the driving mode. [0003] Micromechanical gyroscopes with tuning structures have been extensively studied due to their ability to compensate for device defects caused by imperfect manufacturing processes, and tunable micromechanical gyroscopes with var...

Claims

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Application Information

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IPC IPC(8): G01C19/56
Inventor 金仲和朱辉杰胡世昌刘义东
Owner ZHEJIANG UNIV
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