Preparation method of miniaturized magnetic fluxgate biosensor for serum tumor marker detection
A fluxgate sensor and tumor marker technology, applied in the field of medical detection methods and magnetic sensing, can solve the problems of no miniaturized fluxgate sensor, low sensitivity of individual indicators, lack of flexibility, etc., and achieve no storage requirements, fast detection speed, and high detection sensitivity
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Embodiment 1
[0048] The whole preparation process is divided into the following steps:
[0049] (1) The specific fabrication of the miniaturized fluxgate sensor can be realized by using the existing technology, such as the method described in the patent No. 200910046101.1, which will not be repeated here.
[0050] In this embodiment, the miniaturized fluxgate sensor includes a glass substrate, an exciting coil, a receiving coil, a magnetic core, pins, and polyimide insulating material, and two groups of connected three-dimensional magnetic cores are symmetrically wound on a closed rectangular magnetic core. Solenoid excitation coil, and a group of three-dimensional solenoid receiving coils are wound vertically with the excitation coil; the excitation coil is located on the glass substrate, and is formed by connecting the bottom coil and the top coil through connecting conductors, and the two ends of the excitation coil are connected to pins; The coil is located on the glass substrate, and ...
Embodiment 2
[0069] (1) The specific production of the miniaturized fluxgate sensor of the present invention can be realized by using the existing technology, such as the method described in the patent No. 200910046101.1, which will not be repeated here.
[0070] (2) Sputter a Cr / Au thin film on a glass substrate with a thickness of 500nm. Shake the photoresist, dry, expose, develop, etch the Cr / Au film, and remove the glue, so that the Au film is exposed to the outside.
[0071] (3) Preparation of biosensitive film on Au film. The biologically sensitive membrane is a self-assembled membrane with a thickness of nanometer scale, and the self-assembled membrane is formed by 11-mercaptoundecanoic acid and then activated by a mixed solution of EDC and NHS. details as follows:
[0072] ●Au membrane cleaning: wash with 1M / L NaOH aqueous solution for 10 minutes, then wash with 1M / L HCI aqueous solution for 10 minutes, and finally wash with water and absolute ethanol twice respectively, dry at r...
Embodiment 3
[0088] (1) The specific fabrication of the miniaturized fluxgate sensor can be realized by using the existing technology, such as the method described in the patent No. 200910046101.1, which will not be repeated here.
[0089] (2) Sputter a Cr / Au thin film on a glass substrate with a thickness of 100nm. Shake the photoresist, dry, expose, develop, etch the Cr / Au film, and remove the glue, so that the Au film is exposed to the outside.
[0090] (3) Preparation of biosensitive film on Au film. The biologically sensitive membrane is a self-assembled membrane with a thickness of nanometer scale, and the self-assembled membrane is formed by 11-mercaptoundecanoic acid and then activated by a mixed solution of EDC and NHS. details as follows:
[0091] ●Au membrane cleaning: wash with 1M / L NaOH aqueous solution for 10 minutes, then wash with 1M / L HCI aqueous solution for 10 minutes, and finally wash with water and absolute ethanol twice respectively, dry at room temperature, and ste...
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