Method for correcting error of polarization detection device
A detection device and polarization technology, which is applied to the measurement device, the polarization of the measurement light, the instrument, etc., can solve the problems of inability to measure the positioning error, the process is cumbersome, and the influence cannot be eliminated, and the effect of avoiding simulation and table lookup is achieved.
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[0030] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0031] see first figure 1 , figure 1 It is a schematic diagram of the polarization detection device involved in the correction method of the device error of the polarization detection device of the present invention. Depend on figure 1 It can be seen that the composition of the polarization detection device involved in the present invention includes a phase retarder 2, a polarizer 3 and a photodetector 4 arranged in sequence along the optical axis of the device system, and the output of the photodetector 4 is connected to the signal processing system 5, and the The phase retarder 2 can rotate around the optical axis of the device system under the drive of the driver 6, and the light beam is incident on the phase retarder 2 and the analyzer 3 parallel to the optical axi...
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