Online measurement system and method for plane shape errors
A technology of plane shape and measurement system, which is applied in the direction of electromagnetic measuring device, electric/magnetic contour/curvature measurement, etc. It can solve the problems of increased calculation amount, measurement method unable to measure irregular plane and discontinuous plane, impractical and other problems
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[0102] The present invention will be further described below in conjunction with the accompanying drawings. Such as Figure 5 As shown, the eddy current displacement sensor array 4 is fixed on the machine tool table 3 through the sensor fixture 2, and each eddy current distance sensor 1 is connected with a sensor front end 5, and the sensor front end 5 is responsible for driving the eddy current distance sensor 1 and convert the distance value measured by the corresponding eddy current distance sensor 1 into a voltage signal of -10V~+10V. The sensor front end 5 is connected to the data acquisition and analog-to-digital conversion module 7, which is based on the embedded system design of the DSP processor 8. This module includes functions such as data acquisition control, analog-to-digital conversion, and shape recognition of the measured surface 13. The four-way voltage signals output by the sensor front-end device 5 are respectively input to the DSP processor 8 after analog-t...
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