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Device used for conveying substrate

A technology of substrates and transfer units, which is applied to conveyor objects, transportation and packaging, machines with sequential working positions, etc., can solve problems such as longer acceleration/deceleration time of pallet 2, harmful particles, etc.

Inactive Publication Date: 2013-01-02
SFA ENG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] Also, in the conventional apparatus for transferring substrates, the tray 2 is transferred while being in contact with the driving roller 3 for transferring the driving force, and thus the particles may have harmful effects.
[0011] In addition, in the conventional apparatus for conveying substrates, if the acceleration / deceleration speed of the tray 2 is increased to reduce tact time by conveying the tray 2 quickly, a problem occurs when the tray 2 is accelerated or decelerated. The problem caused by sliding between the drive roller 3 and the lower end of the tray 2, so that the acceleration / deceleration time of the tray 2 becomes longer, because the tray 2 deviates from the desired position, and as the drive roller 3 and the tray 2 The friction between the lower ends of the increases to generate foreign matter (ie, particles)

Method used

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  • Device used for conveying substrate
  • Device used for conveying substrate
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Embodiment Construction

[0123] In order to gain a full understanding of the concept of the invention and its advantages, reference will now be made to the accompanying drawings illustrating various embodiments of the invention.

[0124] Hereinafter, the inventive concept will be explained in detail by explaining embodiments of the invention with reference to the accompanying drawings. Like reference numbers in the figures indicate like elements.

[0125] image 3 is a sectional view of an apparatus for transferring a substrate according to a first exemplary embodiment of the present invention, Figure 4 for image 3 A perspective view of the apparatus for transferring substrates in, Figure 5 for display Figure 4 Perspective views of the relative motion admissible unit, and Figure 6 for image 3 A zoomed-in view of the 'A' region of .

[0126] Such as Figure 3 to Figure 6As shown, the apparatus T1 for transferring a substrate according to the first exemplary embodiment of the present inven...

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Abstract

The invention discloses a device used for conveying a substrate. The device used for conveying the substrate includes a vacuum chamber; a tray used for conveying the substrate in the vacuum chamber; an upper conveying unit used for transmitting driving force to the upper part of the tray in a manner of not contacting with the upper end part of the tray; a relative movement allowing unit coupled to the lower end part of the tray and capable of moving relatively to the tray; and a plurality of guide units used for contacting with the relative movement allowing unit and guiding the movement of the tray.

Description

[0001] Cross References to Related Applications [0002] This application is based on Korean Patent Application No. 10-2011-0065153 filed with the Korean Intellectual Property Office on June 30, 2011, and Korean Patent Application No. 10-2011 filed with the Korean Intellectual Property Office on July 13, 2011. 2011-0069438, the content of which is incorporated herein by reference in its entirety. technical field [0003] The present invention relates to an apparatus for transferring a substrate, and more particularly, to an apparatus capable of transferring a substrate in a vacuum chamber through a tray on which the substrate is placed, the apparatus including an acceleration device for controlling the transfer speed of the substrate / deceleration unit. Background technique [0004] Generally speaking, it is used in the manufacture of liquid crystal display (liquid crystal display; LCD) devices, plasma display panel (plasma display panel; PDP) devices, field emission displ...

Claims

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Application Information

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IPC IPC(8): B65G49/07H01L21/677G02F1/1333H01J9/48
Inventor 郑洪基金起灿韩景录金正训李春秀吴基容徐相训殷熙官金荣敏
Owner SFA ENG CORP
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