Gallium, arsenic and phosphorus/gallium phosphide yellow light narrow-band detector and manufacturing method thereof
A gallium phosphide and detector technology, applied in the field of detectors, can solve the problems of complex and huge testing instruments, not to mention fast, automatic detection, etc., and achieve the effects of improving banknote detection ability, high stability and easy preparation
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[0024] see figure 1 , the GaAsP / GaP PIN PD embodiment is provided with epitaxial wafers, and the epitaxial wafers are sequentially provided with n-type highly doped gallium phosphide single crystals from bottom to top Substrate 2, non-doped gallium phosphide buffer layer 3, non-doped GaAs 0.15 P 0.85 The light absorbing layer 4 and the non-doped gallium phosphide cap layer 5 are provided with an n-type ohmic contact electrode 1 at the bottom of the n-type highly doped gallium phosphide single crystal substrate 2 of the epitaxial wafer; On the gallium phosphide cap layer 5, a silicon nitride mask 6 is first grown, and then a p-type highly doped diffusion region 7 is formed in the cap layer and part of the light-absorbing layer by zinc diffusion through the diffusion window of the mask, and finally p Type ohmic contact electrode 8 and silicon nitride anti-reflection film 9.
[0025] The manufacturing method of the gallium arsenide phosphide / gallium phosphide yellow light narr...
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