Gallium, arsenic and phosphorus/gallium phosphide yellow light narrow-band detector and manufacturing method thereof
A gallium phosphide and detector technology, which is applied in the field of detectors, can solve the problems of complex and huge testing instruments, not to mention fast, automatic detection, etc., and achieve the effects of improving banknote detection ability, high stability and low cost
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[0024] see figure 1 , the GaAsP / GaP PIN PD embodiment is provided with epitaxial wafers, and the epitaxial wafers are sequentially provided with n-type highly doped gallium phosphide single crystals from bottom to top Substrate 2, non-doped gallium phosphide buffer layer 3, non-doped GaAs 0.15 P 0.85 The light absorbing layer 4 and the non-doped gallium phosphide cap layer 5 are provided with an n-type ohmic contact electrode 1 at the bottom of the n-type highly doped gallium phosphide single crystal substrate 2 of the epitaxial wafer; A silicon nitride mask 6, a p-type highly doped diffusion layer 7 formed by zinc diffusion, a p-type ohmic contact electrode 8 and a silicon nitride antireflection film 9 are sequentially grown on the gallium phosphide cap layer 5.
[0025] The manufacturing method of the gallium arsenide phosphide / gallium phosphide yellow light narrow-band detector comprises the following steps:
[0026] 1) Insert the epitaxial wafer (see figure 1 ) cleanin...
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