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Self-biased giant magneto-impedance sensor probe and preparation method thereof

A technology of sensor probe and giant magneto-impedance, which is applied in the field of self-biased giant magneto-impedance sensor probe and its preparation, can solve the problems of limited hard magnetic layer thickness, insufficient sensitivity, small hard magnetic/soft magnetic exchange coupling field, etc., to achieve Improved working stability, easy preparation process, and good product consistency

Inactive Publication Date: 2012-10-03
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The asymmetric giant magneto-impedance effect of filamentary or strip-shaped materials can be realized by the following methods: 1) Bias coil method: by preparing a coil on the sensor, passing a current in the coil to generate a bias magnetic field, if the two along The giant magneto-impedance probes biased in opposite directions are connected in a differential form, and a linear output near zero field can be achieved; however, the method of using an additional coil to generate a bias field will not only increase the difficulty and cost of the sensor unit’s preparation, but more importantly, The fact that adding current to generate a bias field will significantly increase the power consumption of the probe, which is undesirable when the sensor is applied
2) Permanent magnetic bias method: similar to method 1), but using a permanent magnet instead of a bias coil, although this does not increase the power consumption of the sensor, it will increase the volume of the sensor, which is not conducive to the miniaturization of the sensor
Since this asymmetric characteristic is formed due to exchange coupling, the power consumption is greatly reduced compared to method 1), and the volume is also greatly reduced compared to method 2), but due to this hard magnetic / soft magnetic exchange coupling field Formed by annealing, the amorphous magnetic material is easily oxidized when exposed to air, which will reduce the working stability of the prepared sensor probe over time, and more importantly, the thickness of the hard magnetic layer produced by this annealing method is limited ( About 100 nanometers), which makes the hard / soft magnetic exchange coupling field small, and its zero-field linear working area is small (less than ±2Oe), and the sensitivity is insufficient

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  • Self-biased giant magneto-impedance sensor probe and preparation method thereof
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  • Self-biased giant magneto-impedance sensor probe and preparation method thereof

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specific Embodiment approach 1

[0022] The self-biased giant magnetoimpedance sensor probe was prepared by the following procedure:

[0023] (1). Select Co 82.17 Fe 4.45 Ni 1.63 Si 8.6 B 3.15 The amorphous magnetic thin strip has a thickness of 30 microns and a width of 2 mm. A section of amorphous thin strip with a length of 30 mm is cut from the thin strip for use (referred to as: amorphous strip-shaped magnetic material 2).

[0024] (2). The amorphous strip-shaped magnetic material 2 is cleaned as follows: use alkaline solution (ammonia: hydrogen peroxide: deionized water = 1:2:5) to clean and sonicate for 15 minutes, and use deionized water to sonicate for 5 minutes. Acidic solution (hydrochloric acid: deionized water = 1:8) was ultrasonically cleaned for 15 minutes, ultrasonically cleaned with deionized water for 5 minutes, and dried with dry nitrogen.

[0025] (3). The radio frequency magnetron sputtering film preparation process is used to deposit the cobalt ferrite film 1 on both sides of the cl...

specific Embodiment approach 2

[0030] Similar to Embodiment 1, only the amorphous magnetic strip material is replaced with (Co 94 Fe 6 )7Si 10 B 15An amorphous magnetic thin ribbon (thickness 25 μm, width 2 mm, length 15 mm), cobalt ferrite thickness 1 μm. After testing, its linear working area is -3.6~+3.6Oe, and its sensitivity is 325% / Oe. However, the performance of the same size amorphous thin strip giant magnetoimpedance sensor probe annealed at 300 degrees Celsius and 5000 Gauss magnetic field is: linear working area -1.5~+1.5Oe, sensitivity is 115% / Oe. It can be seen that, compared with the annealing method, the preparation method of the present invention doubles the linear working area of ​​the amorphous strip and nearly triples the sensitivity.

[0031] It should be noted that: in the process of preparing the self-bias giant magneto-impedance sensor probe of the present invention, 1, the thickness of the cobalt ferrite film 1 can be controlled between 200 nanometers and 2 microns; 2, the target...

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Abstract

A self-biased giant magneto-impedance sensor probe and a preparation method thereof belong to the technical field of information functional devices. The probe comprises an amorphous strap-shaped magnetic material and metal counter electrodes positioned at two ends of the surface of the amorphous strap-shaped magnetic material, wherein two vectolite films are respectively deposited on two sides of the amorphous strap-shaped magnetic material between the metal counter electrodes; and the upper and the lower vectolite films have consistent hard magnetic phase characteristic in the length direction of the amorphous strap-shaped magnetic material. During preparation of the probe, the key process is that the vectolite films are deposited on the amorphous strap-shaped magnetic material through the radio-frequency magnetron sputtering technology and are magnetized through a magnetizer to present hard magnetic phase. The self-biased giant magneto-impedance sensor probe provided by the invention has the characteristics of small size, easiness in integration and no extra power consumption; the product is simple to prepare, the process is controllable and the stability is high; and a wider linear working space can be obtained and the sensitivity is greatly improved.

Description

technical field [0001] The invention belongs to the technical field of information function devices, and relates to a self-bias giant magneto-impedance sensor probe and a preparation method thereof. Background technique [0002] Since 1994, the study of the giant magnetoimpedance effect has attracted extensive attention of scientists from all over the world because of its great application prospects in the field of magnetic sensors and information storage. Early research focused on both theoretical and experimental studies of the magnetic field and frequency characteristics of the impedance of various components and material forms (wires, ribbons, and films) under different process conditions. Research in this area has made important progress. In order to make the giant magnetoimpedance effect more practical, the current research focuses on how to improve the impedance change rate and sensitivity of the giant magnetoimpedance sensor. [0003] Although compared with filamen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/09G01R3/00
Inventor 钟智勇刘爽张怀武唐晓莉苏桦白飞明
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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