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Porous silicon micron tube and preparation method thereof

A technology of porous silicon and micro-tubes, applied in separation methods, chemical instruments and methods, microstructural technology, etc., can solve problems such as deterioration and poor mechanical stability of porous silicon, and achieve simple process, good mechanical properties and operability. The effect of stability and large specific surface area

Inactive Publication Date: 2012-10-03
EAST CHINA NORMAL UNIV
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Problems solved by technology

However, experiments have shown that the mechanical stability of high-porosity porous silicon is very poor, and the structural properties of porous silicon produced by traditional electrochemical oxidation methods will deteriorate with the increase of porosity and the increase of the resistivity of the starting material. In Appl .Phys.Lett.60 (1992) 2285-2287 pages discussed the influence of stress on the luminescence of porous silicon, showing cracking and fragmentation of porous silicon materials, and a considerable degree of delamination and peeling of porous silicon occurred

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  • Porous silicon micron tube and preparation method thereof
  • Porous silicon micron tube and preparation method thereof
  • Porous silicon micron tube and preparation method thereof

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Embodiment

[0027] In order to illustrate the fracture phenomenon of the porous silicon layer, we design the following experiment: the silicon substrate is a p-type silicon wafer polished on one side, (100) crystal plane, and the resistivity is 5-10Ω·cm. The standard cleaning process for integrated circuits, the RCA process, is used. The specific cleaning methods and functions are as follows:

[0028] The first step is to soak in deionized water for 5 minutes, then concentrated sulfuric acid: hydrogen peroxide = 3: 1, cook at 75-85°C for 10 minutes, the main purpose is to remove organic matter;

[0029] The second step, soak in deionized water for 5 minutes, ammonia water: hydrogen peroxide: deionized water = 1:4:20 (No. 1 liquid), boil at 75-85°C for 10 minutes, the main purpose is to remove tiny particles

[0030] The third step is to soak in deionized water for 5 minutes, concentrated hydrochloric acid: hydrogen peroxide: deionized water = 1:1:6 (No. 2 solution), and boil for 10 minut...

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Abstract

The invention discloses a porous silicon micron tube and a preparation method thereof. The porous silicon micron tube comprises the main structural component of porous silicon, the porous silicon micron tube is in a non-sealed round tubular structure surrounded by the porous silicon, the diameter of the porous silicon micron tube is 10-20 microns, and the length of the porous silicon micron tube is 100-600 microns. The porous silicon micron tube is characterized in that a high-porosity porous silicon layer is prepared by a proper preparation condition, and the porous silicon micron tube is obtained by self-breakage and self-bending processes according to the uneven characteristics of stress in porous silicon by a special drying technology. Because the porous silicon has a special structure characteristic, the porous silicon has a bigger specific surface area as well as good mechanical property and maneuverability once the tubular structure is formed, and the porous silicon has a great potential application value in various fields, such as physical electronics and optics, biomedicine and chemistry, materialogy, micromotor systems and the like.

Description

technical field [0001] The present invention relates to a porous silicon microtube and its preparation method, in particular to a circular, non-closed porous microtube and its preparation method. The method is carried out on a single crystal silicon substrate by electrochemical oxidation and special drying The method is a method for preparing microtubes, which belongs to the technical field of silicon micro-electromechanical systems. Background technique [0002] As a new type of quasi-one-dimensional structural material, microtubes have broad application prospects in the fields of physical electronics, optics, biomedicine, chemistry, materials science, and micro-electrical systems due to their unique structure-performance characteristics. In these novel nanomaterials, the tubular structure has become an important research object of the one-dimensional nanostructure family because of its unique properties and potential value. Micro-tubular structures, because they usually h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B1/00B81C1/00
Inventor 徐少辉王连卫
Owner EAST CHINA NORMAL UNIV
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