Manufacturing method of quasi-black silicon high-efficiency solar cell with ultralow nanometer reflection-reducing structure

Abstract

The invention discloses a manufacturing method of a quasi-black silicon high-efficiency solar cell with an ultralow nanometer reflection-reducing structure. The manufacturing method comprises the following steps of: A, carrying out phosphorus diffusion on a p-type solar cell silicon wafer; B, manufacturing a nanometer column by a chemical corrosion method; C, cleaning the surface of the nanometer column to remove residues; D, carrying out the phosphorus diffusion on a silicon wafer diffusion surface again; and E, carrying out SiNx:Hx:H surface passivation and reflection-reducing thin-film deposition on the silicon wafer to manufacture a negative electrode and a positive electrode of a solar cell, and an aluminum back surface field so as to finish the manufacturing of the quasi-black silicon high-efficiency solar cell with the ultralow nanometer reflection-reducing structure. Through the manufacturing method disclosed by the invention, the solar cell can be combined with the existing technology, and the cost of a device is not increased. Compared with a traditional solar cell, the manufactured solar cell has improved efficiency; in addition, the manufacturing method is simple and has excellent stability.

Description

technical field [0001] The invention relates to the technical field of preparing high-efficiency crystalline silicon solar cells, in particular to a method for preparing quasi-black silicon high-efficiency solar cells with an ultra-low nanometer anti-reflection structure. Background technique [0002] With the global energy shortage and climate warming, renewable energy such as solar power is replacing traditional thermal power and has become a research hotspot and development trend in the energy field today. In the development history of solar cells, both amorphous silicon thin film solar cells and crystalline silicon solar cells have experienced more than half a century of development. Crystalline silicon solar cells have higher efficiency, and amorphous silicon thin-film solar cells have lower manufacturing costs, but the combination of the two advantages to form a third-generation solar cell structure with higher efficiency and lower cost has received relatively little a...

AI Technical Summary

Problems solved by technology

However, this technology has not been able to be applied to the field of solar cells

Moreover, silicon nanocrystals will be etched to cause poor masking effect, so that the masking effect will not be achieved, resulting in corrosion of crystalline silicon nanopillars, which will affect the final battery characteristics.

Images