Element performance prediction method and element structure optimization method

Abstract

The invention discloses an element performance prediction method and an element structure optimization method. According to the embodiment of the invention, structural parameters and / or technique parameters of a semiconductor element form parameter points in a parameter space, a behavior model base is created for a plurality of discrete preset parameter points in the parameter space, and the behavior model base correlates the preset parameter points with corresponding element performance index values. The element performance prediction method comprises the steps of: inputting parameter points with corresponding performance index values to be predicted, namely, prediction points; outputting the corresponding performance index values as the predicted performance index values of the prediction points if corresponding items of the prediction points exist in the model base; and performing interpolation calculation according to Delaunay triangulation to obtain the predicted performance index values of the prediction points if no corresponding items of the prediction points exist in the model base.

Description

technical field [0001] The invention relates to the field of semiconductor devices, and more specifically, to a performance prediction method of a semiconductor device and a structure optimization method of a semiconductor device. Background technique [0002] For semiconductor devices, many structural parameters and / or process parameters will affect their working performance. In practice, however, it is difficult to establish an analytical functional relationship between these parameters and device performance. Therefore, when designing a semiconductor device, for a specific design parameter, it is difficult to know in advance the performance of the semiconductor device manufactured according to the design, and therefore it is difficult to effectively determine whether the design is good or bad. [0003] In view of this, it is necessary to provide a novel method to predict the performance of semiconductor devices or to optimize the design of semiconductor devices, so as to...

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Problems solved by technology

However, it is practically difficult to establish an analytical functional relationship between these parameters and device performance

Therefore, when designing a semiconductor device, for specific design parameters, it is difficult to know in advance the performance of the semiconductor device manufactured according to this design, and therefore it is difficult to effectively determine the pros and cons of the design

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