Metamaterial-based optical tweezers
A left-handed material, optical tweezers technology, applied in the direction of analyzing materials, material analysis by optical means, measuring devices, etc., can solve the problems of low molecular ability, poor sensitivity, high cost, reduce the influence and disturbance of vitality, and capture accuracy. High and stable effect
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[0021] In order to make the content of the technical solution of the present invention clearer, the specific implementation manners of the present invention will be described in detail below in combination with the technical solution and the accompanying drawings. The thin film growth techniques include: evaporation, sputtering, metal organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), electron beam evaporation (E-beam evaporation) or liquid phase epitaxy (LPE) and other common techniques. The masking process includes electron beam lithography (E-beamlithography, EBL), focused ion beam lithography (Focus Ion Beam lithography, FIBL) and other common techniques. The etching process includes wet etching and dry etching, such as common processes such as acid etching, electron beam etching, focused ion beam etching and reactive ion etching (Reactive Ion Etching, RIE).
[0022] First, an N (N>=1) layer sandwich structure (metal layer-insulation layer-metal layer...
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