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Preparation method of in-situ vertically grown titanium dioxide nanosheet film

A vertical growth, titanium dioxide technology, applied in the field of nanomaterials science, can solve the problems of lack of large-area uniformity of film thickness, difficulty in fixing nano-catalysts, and low bonding strength between film and substrate.

Inactive Publication Date: 2012-07-11
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The purpose of the present invention is to overcome the conventional TiO 2 The problem that nano-catalysts are difficult to fix, overcomes the problems of low bonding strength between the film and the substrate, lack of mechanical durability, and lack of large-area uniformity of film thickness in chemical preparation technologies such as sol-gel

Method used

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  • Preparation method of in-situ vertically grown titanium dioxide nanosheet film

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Experimental program
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Embodiment 1

[0015] Cleaning: The substrate (glass sheet, silicon wafer or stainless steel sheet) is ultrasonically cleaned with acetone, absolute ethanol, and double-distilled water in sequence, each ultrasonic time is 15 minutes, and dried for later use.

[0016] Sample placement: place the cleaned substrate on the sample holder in the coating device.

[0017] Vacuuming the background: vacuuming the background to 4.0×10 -3 Pa.

[0018] Plasma cleaning the surface of the sample: turn on the microwave magnetic field, adjust the magnetic field current to 140A, turn on the microwave power supply, adjust the microwave power to 150mA, pass Ar gas into the reaction chamber, 65sccm, make the chamber pressure ~0.4Pa, start the turntable , turn on the pulse bias power supply, adjust the bias value to 200V, and the duty cycle to 50%. Generate plasma to clean the sample surface for 20 min.

[0019] Sputtering coating: reduce the Ar gas flow rate to 85 sccm. Microwave power 150mA. Turn on the sp...

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Abstract

The invention discloses a preparation method of an in-situ vertically grown titanium dioxide nanosheet film. The film is composed of vertically grown and uniformly distributed nanosheets, and is firmly bonded with a substrate; and the film is endowed with superhydrophilicity without ultraviolet irradiation and can be applied to occasions of sewage catalyzing and degrading treatment, indoor odor catalyzing and degrading treatment and the like.

Description

technical field [0001] The present invention relates to in-situ vertical growth of TiO on different substrates 2 The invention discloses a method for preparing a nanosheet thin film, belonging to the field of nanometer material science. Background technique [0002] Nano-TiO 2 It has good catalytic performance no matter in solution or in gas phase reaction. However, due to the small size of powdered nano-titanium oxide particles, it is easy to aggregate and not easy to settle in an aqueous solution, and the catalyst is difficult to recover. Immobilizing the catalyst on the substrate can effectively solve this problem. Currently TiO 2 The fixation of nano-catalysts mainly refers to the coating of catalysts on different materials by various methods. At present, the main coating technologies are mainly spray coating, sol-gel spin coating, pulling method, etc. These methods are simple in equipment and easy to operate, but the prepared catalyst has no special shape, poor cat...

Claims

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Application Information

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IPC IPC(8): C03C17/245
Inventor 冶银平杜雯李红轩赵飞吉利权伟龙陈建敏周惠娣
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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