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Manufacturing method for PLC (planar lightwave circuit) optical device

A manufacturing method and device technology, which is applied in the manufacture of planar optical splitters and optical waveguides, can solve the problems of high raw material requirements, difficult manufacturing, and high maintenance costs, so as to achieve simple process, reduce production costs, and realize The effect of industrial scale production

Inactive Publication Date: 2012-07-04
SUZHOU ORIENTAL SEMICONDUCTOR CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the problem exists in high investment in equipment, high maintenance costs, and high requirements for raw materials (all imported materials are used), and this technology is difficult to manufacture

Method used

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  • Manufacturing method for PLC (planar lightwave circuit) optical device
  • Manufacturing method for PLC (planar lightwave circuit) optical device
  • Manufacturing method for PLC (planar lightwave circuit) optical device

Examples

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Embodiment Construction

[0024] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. In the drawings, for the convenience of illustration, the thicknesses of layers and regions are enlarged or reduced, and the sizes shown do not represent actual sizes. Although these figures do not fully reflect the actual size of the device, they still completely reflect the mutual positions between the regions and the constituent structures, especially the upper-lower and adjacent relationships between the constituent structures. Meanwhile, in the following description, the term substrate used can be understood to include the semiconductor substrate being processed, possibly including other thin film layers prepared thereon.

[0025] Figure 2a It is a schematic diagram of an embodiment of the optical waveguide provided by the present invention, wherein the direction indicated by AB is the propagation direction of light in the optical...

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Abstract

The invention belongs to the technical field of planar lightwave circuit (PLC) splitters and specifically relates to a manufacturing method for optical waveguides, the manufacturing method comprises the following steps of: forming a layer of silicon dioxide on a silicon wafer; depositing photo resists; photo-etching to form patterns; forming an optical waveguide core layer with a high refractive index in a groove among the photo resists; curing the photo resists; and forming an upper film coating layer with low refractive index. The manufacturing method for the optical waveguides is simple in technological process, low in technical difficulty, low in raw material and production equipment requirement, low in production cost and easy to realize the industrialization scale production.

Description

technical field [0001] The invention relates to a method for manufacturing a planar lightwave circuit (PLC), in particular to a method for manufacturing an optical waveguide, and belongs to the technical field of PLC splitters. Background technique [0002] At present, the construction of FTTX (fiber-optic access network) is gradually unfolding, specifically to realize FTTC (fiber-to-the-curb), FTTB (fiber-to-the-building), FTTH (fiber-to-the-home), FTTD (fiber-to-the-desktop), triple play ( Voice network, data network, cable TV network) and other multimedia transmission and PDS (integrated wiring system) solutions. To build an all-fiber network, in addition to the need for various structural distribution cables and lead-in cables to realize the connection and redistribution of the fiber network, a large number of optical splitters are also required to finally complete the purpose of fiber-to-the-home. [0003] PLC optical devices are generally made on six materials, which ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/136
Inventor 刘伟刘磊王鹏飞
Owner SUZHOU ORIENTAL SEMICONDUCTOR CO LTD
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