Water-cooled electrode of high temperature vacuum furnace

Abstract

The invention discloses a water-cooled electrode of high temperature vacuum furnace. The water-cooled electrode comprises an electrode seat having a through hole arranged in the center, an electrode bar arranged to penetrate through the electrode seat, an annular mounting boss arranged on the electrode bar, an insulating flange arranged between the electrode seat and the annular mounting boss, a copper flange arranged on the other side of the annular mounting boss, a cooling cavity arranged in the electrode bar, a cooling water pipe arranged in the cooling cavity, a water inlet pipe arranged at the end of the electrode bar close to the copper flange and communicated with the cooling water pipe, a water outlet pipe arranged also at the end of the electrode bar close to the copper flange and communicated with the cooling cavity, a molybdenum connection block arranged at the other end of the electrode bar and connected with a heater, a flange ring arranged on the copper flange and connected with the insulating flange and the electrode seat via bolts, and an insulating sleeve arranged between the flange ring and the copper flange. The invention is suitable for high-temperature high-vacuum environments, and has reliable and effective insulation and long service life.

Description

technical field [0001] The invention belongs to the field of high-temperature vacuum furnaces, and in particular relates to water-cooled electrodes of high-temperature vacuum furnaces. Background technique [0002] The water-cooled electrode of the high-temperature vacuum furnace is fixed on the high-temperature vacuum furnace body through the electrode holder, so the electrode rod and the electrode holder need to be insulated to ensure the safe operation of the high-temperature vacuum furnace. [0003] The structure of the water-cooled electrode of a conventional high-temperature vacuum furnace is as follows: figure 1 As shown, a water-cooled electrode for a high-temperature vacuum furnace includes an electrode holder with a through hole in the middle, an electrode rod is pierced in the electrode holder, a cooling cavity for passing cooling water is arranged on the electrode rod, and a cooling cavity is provided in the cooling cavity. There is a cooling water pipe, and the...

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Problems solved by technology

[0004] Its shortcomings are: due to the material of the Bakelite insulating sleeve, the bolts cannot be fully pre-tightened during installation

Too much force may cause the bakelite insulating sleeve to break and the insulation will fail; due to the cantilever setting of the electrode rod, the electrode rod will tilt under the action of gravity if the force is too small, which cannot guarantee the vacuum seal in the furnace after installation, and there is no shield for the high temperature radiation in the furnace. Long-term use may cause aging and failure of the O-ring seal, so the water-cooled electrode of this conventional high-temperature vacuum furnace is not suitable for ultra-high temperature vacuum furnaces above 2000 °C

In addition, the electrode rod and the heater are directly connected by bolts, which is inconvenient to locate during installation

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