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Thinned flexible pressure sensor sensitive unit based on flatfish type electrode structure

A pressure sensor and electrode structure technology, applied in the field of sensors, can solve the problems of reducing pressure monitoring accuracy, increasing the complexity of sensor sensitive units, increasing thickness, etc., achieving the effects of reducing complexity, reducing time dependence, and reducing thickness

Inactive Publication Date: 2012-04-18
NORTHEASTERN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, most of the pressure sensitive units made of this sensitive material currently adopt a sandwich structure, that is, the sensitive material is placed between two layers of metal electrodes, and then encapsulated with an insulating film, thus increasing the complexity of the sensor sensitive unit , and increase its thickness
At the same time, the macromolecular segment structure of conductive polymer composites leads to a time-dependent resistance, which seriously reduces the pressure monitoring accuracy.

Method used

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  • Thinned flexible pressure sensor sensitive unit based on flatfish type electrode structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] (1) Lay a circular copper foil electrode with a diameter of 5 mm and a lead wire with a length of 9 cm on the underlying polyimide film, and place it on the fixed platform of the program-controlled lifting platform.

[0025] (2) Mix multi-walled carbon nanotubes with an aspect ratio of 300, room temperature vulcanized silicone rubber and an organic solvent at a volume ratio of 1:20:800, and disperse the nano conductive powder in the mixed solution by mechanical stirring and ultrasonic oscillation , and under the action of ethyl orthosilicate and dibutyltin dilaurate, a multi-walled carbon nanotube / silicone rubber composite material colloidal sticky substance is formed.

[0026] (3) Apply the gel-like viscous evenly on the polyimide film covered with electrodes and leads prepared in step (1), and control the smooth surface fixed on the movable platform of the program-controlled lifting platform through a microcomputer. The rigid plate moves down, extruding the jelly into...

Embodiment 2

[0031] (1) Lay a circular copper foil electrode with a diameter of 6 mm and a lead wire with a length of 8 cm on the bottom polyimide film, and place it on the fixed platform of the program-controlled lifting platform for standby.

[0032] (2), carbon black, room temperature vulcanized silicone rubber and organic solvent with a particle diameter of 20 nanometers are mixed in a volume ratio of 1: 16: 960, and the nano conductive powder is dispersed in the mixed solution by mechanical stirring and ultrasonic vibration, and the Under the action of ethyl orthosilicate and dibutyltin dilaurate, a multi-walled carbon nanotube / silicone rubber composite material colloidal sticky substance is formed.

[0033] (3) Apply the gel-like viscous evenly on the polyimide film covered with electrodes and leads prepared in step (1), and control the smooth surface fixed on the movable platform of the program-controlled lifting platform through a microcomputer. The rigid plate moves down, extrudin...

Embodiment 3

[0038] (1) Lay a circular copper foil electrode with a diameter of 3 mm and a lead wire with a length of 10 cm on the underlying polyimide film, and place it on the fixed platform of the program-controlled lifting platform for standby.

[0039] (2) Mix multi-walled carbon nanotubes with an aspect ratio of 200, room temperature vulcanized silicone rubber and an organic solvent in a volume ratio of 1:12:600, and disperse the nano conductive powder in the mixed solution by mechanical stirring and ultrasonic oscillation , and under the action of ethyl orthosilicate and dibutyltin dilaurate, a multi-walled carbon nanotube / silicone rubber composite material colloidal sticky substance is formed.

[0040] (3) Apply the gel-like viscous evenly on the polyimide film covered with electrodes and leads prepared in step (1), and control the smooth surface fixed on the movable platform of the program-controlled lifting platform through a microcomputer. A rigid plate moves down, extruding the...

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Abstract

The invention relates to a thinned flexible pressure sensor sensitive unit based on a flatfish type electrode structure, belonging to the technical field of sensors. The sensitive unit comprises a top packaging film, a bottom packaging film and a pressure-sensitive film arranged in the middle, wherein the top packaging film is made of polyimide material, the pressure-sensitive film is made of nano conductive polymer composite material, the bottom packaging film is a polyimide film with a pair of electrodes / leads, the two electrodes / leads are both arranged at the same side of the pressure-sensitive film so as to form a flatfish type electrode structure. The pressure-sensitive unit developed by using the method provided by the invention has the advantages of slight thickness, simple structure, low cost and the like; moreover, since signals are led out from the same side of a sensitive material, time dependence of the pressure-sensitive unit during signal output is reduced, and adverse effect of time dependence on the measurement accuracy is reduced further; therefore, the sensitive unit is especially applicable to the fields of interlayer pressure monitoring of narrow and small curved surfaces of national defense and industrial equipment, artificial electronic skin research and development and the like.

Description

technical field [0001] The invention belongs to the technical field of sensors, in particular to a soft sensor preparation process. Background technique [0002] Nano conductive polymer composites have piezoresistive properties, easy processing and flexibility. Therefore, this material can be used as a sensitive material for thin and soft pressure sensors, and can be widely used in national defense, industry and civilian fields. Such as: pressure monitoring between layers of narrow curved surfaces of large equipment, development of artificial electronic skin, etc. However, most of the pressure sensitive units made of this sensitive material currently use a sandwich structure, that is, the sensitive material is placed between two layers of metal electrodes, and then encapsulated with an insulating film, thus increasing the complexity of the sensor sensitive unit , and increase its thickness. At the same time, the macromolecular segment structure of conductive polymer compo...

Claims

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Application Information

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IPC IPC(8): G01L1/18
Inventor 王璐珩李艳玲王雪婷
Owner NORTHEASTERN UNIV
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